Abstract: Provided is a substrate processing apparatus control system and substrate processing apparatus control method, the substrate processing apparatus control system including an image generator for generating an image to be printed by a substrate processing apparatus including an inkjet head unit to print the image on a substrate in an inkjet printing manner, a jetting driver for receiving an image signal from the image generator and outputting a jetting signal to the inkjet head unit to allow the substrate processing apparatus to print the image on the substrate based on the image signal, and a motion controller for controlling operation of a stage unit for supporting and moving the substrate in the substrate processing apparatus.

Abstract: A chemical liquid removing unit may remove a remaining chemical liquid from an ink jet head. The chemical liquid removing unit may include a surface tension providing part configured to remove the remaining chemical liquid from a nozzle face of the ink jet head using a surface tension, a driving part configured to move the surface tension providing part relative to the nozzle face the ink jet head, and a control part configured to control the driving part such that the surface tension providing part contacts the remaining chemical liquid whereas the surface tension providing part does not contact the nozzle face of the ink jet head.

Abstract: Provided is a treatment liquid ejection method and apparatus capable of significantly increasing productivity and quality by greatly reducing a maintenance time of a head unit, the treatment liquid ejection method including (a) obtaining test image information by test-photographing a treatment liquid test-printed by a head unit, (b) generating nozzle-specific characteristic information by using the test image information, (c) generating print file information to be printed, in consideration of the nozzle-specific characteristic information, (d) reflecting recipe information of a substrate or the head unit to prepare the print file information in an outputtable state, and (e) printing, on the substrate by the head unit, the print file information to which the recipe information is reflected.

Abstract: In a printing method using an ink jet head, a chemical liquid may be discharged onto a substrate from a plurality of nozzles of the ink jet head. Discharging numbers of the chemical liquid from the plurality of nozzles may be identified and a cumulative discharging number of the chemical liquid from the plurality of nozzles may be calculated. The cumulative discharging number of the chemical liquid may be compared with a previously set limit discharging number of the ink jet head. A replacement time of the ink jet head may be determined if the cumulative discharging number of the chemical liquid exceeds the previously set limit discharging number.

Abstract: An apparatus for discharging chemical liquid may include an ink jet head, a gantry and a control member. The ink jet head may include a plurality of nozzles capable of discharging chemical liquid onto a substrate. The gantry may hold the ink jet head to place the ink jet head over the substrate. The control member may control the ink jet head such that discharge times of the chemical liquid from the nozzles of the ink jet head may be changed.

Abstract: An apparatus for supplying chemical liquid may include a chemical liquid discharging member, a reservoir, a chemical liquid supplying member and a chemical liquid circulating member. The chemical liquid discharging member may discharge a chemical liquid onto a substrate. The reservoir may store the chemical liquid supplied to the chemical liquid discharging member. The chemical liquid supplying member may supply the chemical liquid stored in the reservoir. The chemical liquid circulating member may circulate the chemical liquid from the chemical liquid discharging member to the reservoir.

Abstract: In a printing method using an ink jet head, a chemical liquid may be discharged onto a substrate from a plurality of nozzles of the ink jet head. Discharging numbers of the chemical liquid from the plurality of nozzles may be identified and a cumulative discharging number of the chemical liquid from the plurality of nozzles may be calculated. The cumulative discharging number of the chemical liquid may be compared with a previously set limit discharging number of the ink jet head. A replacement time of the ink jet head may be determined if the cumulative discharging number of the chemical liquid exceeds the previously set limit discharging number.

Abstract: An apparatus for discharging chemical liquid may include an ink jet head, a gantry and a control member. The ink jet head may include a plurality of nozzles capable of discharging chemical liquid onto a substrate. The gantry may hold the ink jet head to place the ink jet head over the substrate. The control member may control the ink jet head such that discharge times of the chemical liquid from the nozzles of the ink jet head may be changed.

Abstract: An apparatus for supplying chemical liquid may include a chemical liquid discharging member, a reservoir, a chemical liquid supplying member and a chemical liquid circulating member. The chemical liquid discharging member may discharge a chemical liquid onto a substrate. The reservoir may store the chemical liquid supplied to the chemical liquid discharging member. The chemical liquid supplying member may supply the chemical liquid stored in the reservoir. The chemical liquid circulating member may circulate the chemical liquid from the chemical liquid discharging member to the reservoir.