Abstract: A semiconductor manufacturing equipment may include a process chamber for treating a substrate; a front-end module including a first transfer robot, wherein the first transfer robot may be configured to transport the substrate received in a container; a transfer chamber between the front-end module and the process chamber, wherein the transfer chamber may be configured to load or unload the substrate into or out of the process chamber; and a cassette capable of receiving a replaceable component capable of being used in the process chamber. The front-end module may include a seat plate configured to move in a sliding manner so as to retract or extend into or from the front-end module. The cassette may be configured to be loaded into the front-end module while the cassette is seated on the seat plate.

Abstract: Disclosed is a method of quantifying furan concentration to efficiently manage a deterioration state of a transformer in the field. The method of quantifying furan concentration includes: measuring a color-development degree of an extraction solution by making the extraction solution containing furan extracted from an insulating-oil sample mix and react with a color reagent; and quantifying furan concentration by correction based on a correlation between a precise analysis and a simple analysis with regard to the color-development degree of the extraction solution, wherein the precise analysis is to obtain a quantitative value through color column separation based on high performance liquid chromatography (HPLC) in a laboratory to analyze a furan compound in insulating oil of a transformer, and the simple analysis is to obtain a chromaticity value in a field with regard to actual transformer samples.

Abstract: Disclosed is a guidewire steering micro-robot. The guidewire steering micro-robot includes a guidewire, and a steering unit provided at an end portion of the guidewire, the steering unit including a magnetic body to control and steer a position of the guidewire by an external magnetic field.

Abstract: A composite power generating device of the present invention includes an engine (110), a first flow line (121), a turbocharger (130), a second flow line (122), a third flow line (123), a compressor (211), a first medium line (221), a medium turbine (212), a second medium line (222), a working medium cooler (213), a recuperator (215), a power generating unit (214), a cross-line (233), a first heat exchanger (251), a second heat exchanger (252), and a third heat exchanger (253).

Abstract: A composite power generating device of the present invention includes an engine (110), a first flow line (121), a turbocharger (130), a second flow line (122), a third flow line (123), a compressor (211), a first medium line (221), a medium turbine (212), a second medium line (222), a working medium cooler (213), a recuperator (215), a power generating unit (214), a cross-line (233), a first heat exchanger (251), a second heat exchanger (252), and a third heat exchanger (253).

Abstract: Provided is a high-temperature fuel cell separator. The fuel cell separator includes a fuel gas flow path containing hydrogen, an oxidant gas flow path containing mainly an oxygen component being supplied from an oxygen/nitrogen separator of a system and participating in electrochemical reactions, and a cooling gas flow path containing a nitrogen component to remove heat produced upon power generation of a fuel cell. Such a configuration provides a high-temperature fuel cell separator which is capable of improving efficiency of an overall fuel cell system through improved performance of a fuel cell stack due to increased oxygen partial pressure and which is also capable of improving reliability of the fuel cell stack through inhibition of the occurrence of a high-temperature region resulting from heat produced upon power generation of a fuel cell, by means of a flow of cooling gas containing a nitrogen component.

Abstract: Provided is a high-temperature fuel cell separator. The fuel cell separator includes a fuel gas flow path containing hydrogen, an oxidant gas flow path containing mainly an oxygen component being supplied from an oxygen/nitrogen separator of a system and participating in electrochemical reactions, and a cooling gas flow path containing a nitrogen component to remove heat produced upon power generation of a fuel cell. Such a configuration provides a high-temperature fuel cell separator which is capable of improving efficiency of an overall fuel cell system through improved performance of a fuel cell stack due to increased oxygen partial pressure and which is also capable of improving reliability of the fuel cell stack through inhibition of the occurrence of a high-temperature region resulting from heat produced upon power generation of a fuel cell, by means of a flow of cooling gas containing a nitrogen component.