Abstract: A positioner for positioning an object with sub-micron resolution is disclosed. The positioner includes a first stage having a first stage housing and adapted to provide dual-axis motion for coarse positioning of the object, and a second stage secured substantially within the first stage housing and adapted to provide dual-axis motion for fine positioning of the object. The second stage comprises a second stage housing on which the object may be removably secured. The first stage is preferably a stepper motor or servo motor and the second stage is a piezoelectric actuator. The first stage housing preferably includes air bearings positioned on a surface thereof.

Abstract: A positioner for positioning an object with sub-micron resolution is disclosed. The positioner includes a first stage having a first stage housing and adapted to provide dual-axis motion for coarse positioning of the object, and a second stage secured substantially within the first stage housing and adapted to provide dual-axis motion for fine positioning of the object. The second stage comprises a second stage housing on which the object may be removably secured. The first stage is preferably a stepper motor or servo motor and the second stage is a piezoelectric actuator. The first stage housing preferably includes air bearings positioned on a surface thereof.

Abstract: A positioner for positioning an object with sub-micron resolution is disclosed. The positioner includes a first stage having a first stage housing and adapted to provide dual-axis motion for coarse positioning of the object, and a second stage secured substantially within the first stage housing and adapted to provide dual-axis motion for fine positioning of the object. The second stage comprises a second stage housing on which the object may be removably secured. The first stage is preferably a stepper motor or servo motor and the second stage is a piezoelectric actuator. The first stage housing preferably includes air bearings positioned on a surface thereof.

Abstract: An air bearing slide assembly including a carriage having a plurality of planar slide faces containing integrally mounted porous carbon air bearings, the carriage being movable over a slide ram. The slide faces of the carriage being mated to opposing planar slide surfaces on the slide ram, wherein compressed air expelled from the air bearings creates a hydrostatic fluid film between the slide ram and the air bearings, thereby separating and supporting the carriage for longitudinal movement over the slide ram.

Abstract: An air bearing slide assembly including a carriage having a plurality of planar slide faces containing integrally mounted porous carbon air bearings, the carriage being movable over a slide ram. The slide faces of the carriage being mated to opposing planar slide surfaces on the slide ram, wherein compressed air expelled from the air bearings creates a hydrostatic fluid film between the slide ram and the air bearings, thereby separating and supporting the carriage for longitudinal movement over the slide ram.

Abstract: An air bearing slide assembly including a carriage having a plurality of planar slide faces containing integrally mounted porous carbon air bearings, the carriage being movable over a slide ram. The slide faces of the carriage being mated to opposing planar slide surfaces on the slide ram, wherein compressed air expelled from the air bearings creates a hydrostatic fluid film between the slide ram and the air bearings, thereby separating and supporting the carriage for longitudinal movement over the slide ram.

Abstract: A lead screw piezo nut positioning device includes coupling and driven members and a piezo nut positioner assembly. The coupling member is secured to an external machine part and received about a lead screw such that the lead screw does not directly drivingly engage and cause movement of the coupling member nor of the external machine part. The driven member is threadably coupled about the lead screw for undergoing coarse movement along the lead screw in response to its rotation. The piezo nut positioner assembly is disposed between the coupling and driven members and received over the lead screw such that the assembly is not directly drivingly engaged nor moved by the lead screw.