Patents by Inventor Bernard A. Roque, Jr.

Bernard A. Roque, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Susceptor pocket with beveled projection sidewall
    Patent number: 7381276
    Abstract: An apparatus for holding a semiconductor substrate comprises a plate having a pocket which holds the substrate, wherein the pocket comprises a lower surface and an inner edge. The inner edge comprises a plurality of members extending radially inward to reduce the area of contact between the inner edge and the substrate. The beveled edge is inclined so that there is an acute angle between the lower surface of the pocket and the beveled edge.
    Type: Grant
    Filed: July 16, 2002
    Date of Patent: June 3, 2008
    Assignee: International Business Machines Corporation
    Inventors: Donna K. Johnson, Jim S. Nakos, Jean-Jacques H. Psaute, Bernard A. Roque, Jr.