Patents by Inventor Bernard Foster

Bernard Foster has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Porous polyurethane polishing pads
    Patent number: 6899602
    Abstract: A porous polishing pad is useful for polishing semiconductor substrates. The porous polishing pad has a porous matrix formed from a coagulated polyurethane and a non-fibrous polishing layer. The non-fibrous polishing layer has a polishing surface with a pore count of at least 500 pores per mm2 that decreases with removal of the polishing layer; and the polishing surface has a surface roughness Ra between 0.01 and 3 ?m.
    Type: Grant
    Filed: July 30, 2003
    Date of Patent: May 31, 2005
    Assignee: Rohm and Haas Electronic Materials CMP Holdings, NC
    Inventors: Clyde A. Fawcett, T. Todd Crkvenac, Kenneth A. Prygon, Bernard Foster
  • Porous polyurethane polishing pads
    Publication number: 20050026552
    Abstract: A porous polishing pad is useful for polishing semiconductor substrates. The porous polishing pad has a porous matrix formed from a coagulated polyurethane and a non-fibrous polishing layer. The non-fibrous polishing layer has a polishing surface with a pore count of at least 500 pores per mm2 that decreases with removal of the polishing layer; and the polishing surface has a surface roughness Ra between 0.01 and 3 ?m.
    Type: Application
    Filed: July 30, 2003
    Publication date: February 3, 2005
    Inventors: Clyde Fawcett, T. Crkvenac, Kenneth Prygon, Bernard Foster
  • Polishing pad installation tool
    Patent number: 6830090
    Abstract: A polishing pad installation tool comprised of a base portion and at least one compressible layer in operative connection with the base portion. The compressible layer includes a plurality of apertures through an upper surface of the compressible layer. The tool further includes a plurality of parallel pins extending outwardly from the base portion through the apertures of the compressible layer. Each of the pins includes a collar portion in surrounding relation about each pin. When the compressible layer is in an uncompressed condition, the collar portions are beneath the upper surface of the compressible layer. The pins are positioned on the base portion in a pattern which corresponds to the holes in the polishing platen. The pins have diameters which are smaller than the diameters of the holes in a polishing pad. The collars have diameters larger than the diameters of the holes in the polishing pad.
    Type: Grant
    Filed: December 4, 2001
    Date of Patent: December 14, 2004
    Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
    Inventor: Bernard Foster
  • Polishing pad installation tool
    Publication number: 20020081958
    Abstract: A polishing pad installation tool comprised of a base portion and at least one compressible layer in operative connection with the base portion. The compressible layer includes a plurality of apertures through an upper surface of the compressible layer. The tool further includes a plurality of parallel pins extending outwardly from the base portion through the apertures of the compressible layer. Each of the pins includes a collar portion in surrounding relation about each pin. When the compressible layer is in an uncompressed condition, the collar portions are beneath the upper surface of the compressible layer. The pins are positioned on the base portion in a pattern which corresponds to the holes in the polishing platen. The pins have diameters which are smaller than the diameters of the holes in a polishing pad. The collars have diameters larger than the diameters of the holes in the polishing pad.
    Type: Application
    Filed: December 4, 2001
    Publication date: June 27, 2002
    Inventor: Bernard Foster
  • Disk for conditioning polishing pads
    Patent number: 6390909
    Abstract: A conditioning disk including a unitary thermoplastic polymer sheet material cut a unitary circular plate formed with gear teeth along its circular edge, and formed with block form protrusions that are impelled in a sweeping motion by rotation of the unitary plate as a planetary gear in meshed engagement with a sun gear and a ring gear of a polishing apparatus.
    Type: Grant
    Filed: March 28, 2001
    Date of Patent: May 21, 2002
    Assignee: Rodel Holdings, Inc.
    Inventors: Bernard Foster, Paul J. Freeman
  • Disk for conditioning polishing pads
    Publication number: 20010041527
    Abstract: A conditioning disk including a unitary thermoplastic polymer sheet material cut a unitary circular plate formed with gear teeth along its circular edge, and formed with block form protrusions that are impelled in a sweeping motion by rotation of the unitary plate as a planetary gear in meshed engagement with a sun gear and a ring gear of a polishing apparatus.
    Type: Application
    Filed: March 28, 2001
    Publication date: November 15, 2001
    Inventors: Bernard Foster, Paul J. Freeman