Abstract: A method of: directing an exposing light through an optical diffuser; directing the diffused light though a photomask having transparent areas corresponding to a gray-tone pattern; directing the masked light onto a photoresist material on a substrate; developing the photoresist to produce a three dimensional structure in the photoresist.

Abstract: A method of: directing an exposing light through an optical diffuser; directing the diffused light though a photomask having transparent areas corresponding to a gray-tone pattern; directing the masked light onto a photoresist material on a substrate; developing the photoresist to produce a three dimensional structure in the photoresist.

Abstract: An apparatus and method for operating a direct wafer bonded semiconductor radiation detector includes bonding a plurality of wafers, receiving a radiation signal from a radiation source thereby producing electron and hole pairs via the radiation signal interacting with the detecting device. A voltage source produces a voltage across the direct bonded wafers, thereby drifting the electrons and holes through the plurality of bonded layers. The drifted electrons and/or holes include total drifted charge information of the detector and are collected and processed either at the detector or remote from the detector.

Abstract: A device for determining the photon energy E1 and direction cone angle of incident gamma ray includes a radiation detector for receiving an incident gamma ray having an unknown photon energy E1 and an unknown direction and for scattering the gamma ray with two Compton scattering interactions and a subsequent scattering or absorption interaction. The detector provides three outputs, each output corresponding to one of the Compton scattering and the subsequent scattering or absorption interactions, to a processor, which is programmed to calculate the photon energy E1 and direction cone angle of the incident gamma ray based on these outputs.

Abstract: A device for determining the photon energy E1 and direction cone angle of incident gamma ray includes a radiation detector for receiving an incident gamma ray having an unknown photon energy E1 and an unknown direction and for scattering the gamma ray with two Compton scattering interactions and a subsequent scattering or absorption interaction. The detector provides three outputs, each output corresponding to one of the Compton scattering and the subsequent scattering or absorption interactions, to a processor, which is programmed to calculate the photon energy E1 and direction cone angle of the incident gamma ray based on these outputs.