Patents by Inventor Bernard Van Essen

Bernard Van Essen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radiation source and method for lithographic apparatus for device manufacture
    Patent number: 8890099
    Abstract: A radiation source for generating EUV from a stream of molten metal fuel droplets by LPP (Laser Produced Plasma) or (Dual Laser Plasma) has a fuel droplet generator arranged to provide a stream of droplets of fuel and at least one laser configured to vaporise at least some of said droplets of fuel, whereby radiation is generated. The fuel droplet generator has nozzle, fuel supply line, and reservoir, with a pumping device arranged to supply a flow of molten metal fuel from the reservoir through the fuel feed line and out of the nozzle as a stream of droplets. The fuel droplet generator has a replaceable filter assembly in the fuel feed line, arranged to filter the molten metal fuel in use, to deter nozzle blockage by solid particulate impurities in the fuel.
    Type: Grant
    Filed: July 27, 2012
    Date of Patent: November 18, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Ronald Johannes Hultermans, Antonius Theodorus Wilhelmus Kempen, Bernard Van Essen
  • Radiation Source and Method for Lithographic Apparatus for Device Manufacture
    Publication number: 20140209817
    Abstract: A radiation source for generating EUV from a stream of molten metal fuel droplets by LPP (Laser Produced Plasma) or (Dual Laser Plasma) has a fuel droplet generator arranged to provide a stream of droplets of fuel and at least one laser configured to vaporise at least some of said droplets of fuel, whereby radiation is generated. The fuel droplet generator has nozzle, fuel supply line, and reservoir, with a pumping device arranged to supply a flow of molten metal fuel from the reservoir through the fuel feed line and out of the nozzle as a stream of droplets. The fuel droplet generator has a replaceable filter assembly in the fuel feed line, arranged to filter the molten metal fuel in use, to deter nozzle blockage by solid particulate impurities in the fuel.
    Type: Application
    Filed: July 27, 2012
    Publication date: July 31, 2014
    Applicant: ASML Netherlands B.V.
    Inventors: Ronald Johannes Hultermans, Antonius Theodorus Wilhelmus Kempen, Bernard Van Essen