Patents by Inventor Bernard Woods

Bernard Woods has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for controlling the rate of emission of electrons used for charge neutralization in ion implantation
    Patent number: 5126576
    Abstract: Method and apparatus for the control of the rate of emission of electrons added to an ion implantation beam to neutralize charging effects on semiconductor wafers being processed. A net charging current, or equivalent voltage, is sensed continuously, but is sampled only when a selected wafer, or multiple selected wafers, are positioned to receive the entire cross section of the ion beam. The sampled charging current is used to control the addition of charge-neutralizing electrons to the ion beam, thereby eliminating problems that ensue from the use of an averaged charging current that is sensed without regard to the relative beam position or the number of wafers being processed.
    Type: Grant
    Filed: December 13, 1990
    Date of Patent: June 30, 1992
    Assignee: Applied Materials, Inc.
    Inventors: Michael T. Wauk, II, Bernard Woods, Jose-Antonio Marin, Nicholas J. Bright