Patents by Inventor Bernardus A. Mulder

Bernardus A. Mulder has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Elastic guiding device, positioning device, blade and lithographic apparatus
    Patent number: 11421729
    Abstract: The invention relates to elastic guiding device to support a mass with respect to a base in a support direction, wherein the stiffness in support direction compared to stiffness in other direction, for example the stiffness in vertical direction compared to the stiffness in horizontal directions is substantially increased. The invention further relates to a positioning device comprising at least one elastic guiding device, and a lithographic apparatus comprising such positioning device.
    Type: Grant
    Filed: December 12, 2019
    Date of Patent: August 23, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Erwin Andreas Bernardus Mulder, Krijn Frederik Bustraan, Antonius Franciscus Johannes De Groot, Rinze Koolstra, Paul Peter Anna Antonius Brom
  • ELASTIC GUIDING DEVICE, POSITIONING DEVICE, BLADE AND LITHOGRAPHIC APPARATUS
    Publication number: 20220082126
    Abstract: The invention relates to elastic guiding device to support a mass with respect to a base in a support direction, wherein the stiffness in support direction compared to stiffness in other direction, for example the stiffness in vertical direction compared to the stiffness in horizontal directions is substantially increased. The invention further relates to a positioning device comprising at least one elastic guiding device, and a lithographic apparatus comprising such positioning device.
    Type: Application
    Filed: December 12, 2019
    Publication date: March 17, 2022
    Applicant: ASML Netherlands B.V.
    Inventors: Erwin Andreas Bernardus MULDER, Krijn Frederik BUSTRAAN, Antonius Franciscus Johanne DE GROOT, Rinze KOOLSTRA, Paul Peter Anna Antoniu BROM
  • Polygonal mirror with tightened reflecting foil
    Patent number: 4362363
    Abstract: A polygonal mirror is provided which presents a plurality of mirror surfaces arranged about an axis of rotation with all the mirror surfaces at the same inclination relative to that axis. The mirror comprises a reflecting foil tightened over a plurality of supporting elements arranged about the axis of rotation. Equal angles between the mirror surfaces are obtained by employing cylinders as the supporting elements. The cylinders all have the same outside diameter, and are placed together with each touching two neighboring cylinders and each in contact with a central cylinder the axis of which coincides with the axis of rotation.
    Type: Grant
    Filed: June 25, 1980
    Date of Patent: December 7, 1982
    Assignee: OCE-Nederland B.V.
    Inventors: Bernardus A. Mulder, Bontko Witteveen