Abstract: A method and apparatus for preparing samples for imaging under cryogenic conditions or diffraction experiments under cryogenic conditions in an electron microscope. One version of the method involves: partially submerging a flat sample carrier with sample material vertically into a reservoir containing a cryogenic liquid until all areas with sample material are positioned below the surface of the cryogenic liquid; vitrifying the sample material at least one stream of cryogenic liquid to each considerable side of the sample material on the flat sample carrier at or directly below the surface of the cryogenic liquid in the reservoir; and fully submerging the flat sample carrier with the vitrified sample material into the cryogenic liquid to cool the flat sample carrier to a temperature below about 136 K. Variations of the method and various features of the apparatus are described.

Abstract: A cluster tool includes multiple tools for microscopic processing of a sample positioned around a rotatable base. A sample holder on the base rotates the sample between the working areas of the tools. A slidable vacuum seal maintains a vacuum in a sample chamber for tools that require a vacuum.