Patents by Inventor Bernardus Slaghekke

Bernardus Slaghekke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus
    Publication number: 20050263068
    Abstract: Liquid is supplied to a space between the projection system and the substrate by an inlet. In an embodiment, an overflow region removes liquid above a given level. The overflow region may be arranged above the inlet and thus the liquid may be constantly refreshed and the pressure in the liquid may remain substantially constant.
    Type: Application
    Filed: October 18, 2004
    Publication date: December 1, 2005
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Christiaan Hoogendam, Bob Streefkerk, Johannes Catharinus Mulkens, Erik Theodorus Bijlaart, Aleksey Kolesnychenko, Erik Loopstra, Jeroen Johannes Sophia Mertens, Bernardus Slaghekke, Patricius Aloysius Tinnemans, Helmar Van Santen
  • Lithographic apparatus and device manufacturing method
    Publication number: 20050007569
    Abstract: In a lithographic apparatus, a localized area of the substrate surface under a projection system is immersed in liquid. The height of a liquid supply system above the surface of the substrate can be varied using actuators. A control system uses feedforward or feedback control with input of the surface height of the substrate to maintain the liquid supply system at a predetermined height above the surface of the substrate.
    Type: Application
    Filed: May 13, 2004
    Publication date: January 13, 2005
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Bob Streefkerk, Levinus Bakker, Johannes Baselmans, Hendrikus Cox, Antonius Theodorus Derksen, Sjoerd Donders, Christiaan Hoogendam, Joeri Lof, Erik Loopstra, Jeroen Johannes Mertens, Frits Van Der Meulen, Johannes Mulkens, Gerardus Van Nunen, Klaus Simon, Bernardus Slaghekke, Alexander Straaijer, Jan-Gerard Van Der Toorn, Martijn Houkes