Patents by Inventor Bernd Geh
Bernd Geh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20080212060Abstract: A method for determining intensity distribution in the focal plane of a projection exposure arrangement, in which a large aperture imaging system is emulated and a light from a sample is represented on a local resolution detector by an emulation imaging system. A device for carrying out the method and emulated devices are also described. The invention makes it possible to improve a reproduction quality since the system apodisation is taken into consideration. The inventive method consists in includes determining the integrated amplitude distribution in an output pupil, combining the integrated amplitude distribution with a predetermined apodization correction and calculating a corrected apodization image according to the modified amplitude distribution.Type: ApplicationFiled: September 2, 2006Publication date: September 4, 2008Applicant: CARL ZEISS SMS GMBHInventors: Joern Greif-Wuestenbecker, Beate Boehme, Ulrich Stroessner, Michael Totzeck, Vladimir Kamenov, Olaf Dittmann, Daniel Kraehmer, Toralf Gruner, Bernd Geh
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Publication number: 20080204692Abstract: A method for producing microstructured components in a microlithographic projection exposure apparatus is disclosed. The method includes imaging a pattern of structures into an image plane of a projection objective. The dose distribution of projection light in the image plane can be influenced so that the image of a structure is at least essentially independent of the topography of structures which lie inside a region surrounding the structure.Type: ApplicationFiled: March 25, 2008Publication date: August 28, 2008Applicant: CARL ZEISS SMT AGInventors: Toralf Gruner, Bernd Geh
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Publication number: 20080068599Abstract: In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.Type: ApplicationFiled: November 16, 2007Publication date: March 20, 2008Applicant: Carl Zeiss SMT AGInventors: Bernd Geh, Paul Graupner, Thomas Stammler, Dirk Stenkamp, Jochen Stuhler, Klaus Wurmbrand
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Patent number: 7301622Abstract: In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.Type: GrantFiled: July 22, 2005Date of Patent: November 27, 2007Assignee: Carl Zeiss SMT AGInventors: Bernd Geh, Paul Gräupner, Thomas Stammler, Dirk Stenkamp, Jochen Stühler, Klaus Wurmbrand
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Publication number: 20070260437Abstract: A process of obtaining short-range flare model parameters representing a short-range flare which degrades a contrast of an image generated by a lithography tool, is disclosed. Short-range flare is measured from the image to obtain measured short-range flare data. A simulation is performed based on short-range flare model parameters to obtain simulated short-range flare data. The simulated short-range flare data is compared with the measured short range flare data. It is determined whether the short-range flare model parameters used in the simulation is appropriate based on the comparison result. The short-range flare model parameters is optimized according to the measured short-range data and the simulated short-range flare data if the short-range flare model parameters used for the simulation is not appropriate.Type: ApplicationFiled: May 2, 2006Publication date: November 8, 2007Inventors: Tamer Coskun, Sangbong Park, Jang Chen, Bernd Geh
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Publication number: 20070146668Abstract: A method of optimizing lithographic processing to achieve substrate uniformity, is presented herein. In one embodiment. The method includes deriving hyper-sampled correlation information indicative of photoresist behavior for a plurality of wafer substrates processed at pre-specified target processing conditions. The derivation includes micro-exposing subfields of the substrates with a pattern, processing the substrates at the various target conditions, determining photoresist-related characteristics of the subfields (e.g., Bossung curvatures), and extracting correlation information regarding the subfield characteristics and the different target processing conditions to relate the target conditions as a function of subfield characteristics. The method then detects non-uniformities in a micro-exposed subsequent substrate processed under production-level processing conditions and exploits the correlation information to adjust the production-level conditions and achieve uniformity across the substrate.Type: ApplicationFiled: February 22, 2007Publication date: June 28, 2007Applicant: ASML Netherlands B.V.Inventors: Bernd Geh, Roger Irwin, Eric Janda, David Phillips
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Patent number: 7198873Abstract: A method of optimizing lithographic processing to achieve substrate uniformity, is presented herein. In one embodiment, The method includes deriving hyper-sampled correlation information indicative of photoresist behavior for a plurality of wafer substrates processed at pre-specified target processing conditions. The derivation includes micro-exposing subfields of the substrates with a pattern, processing the substrates at the various target conditions, determining photoresist-related characteristics of the subfields (e.g., Bossung curvatures), and extracting correlation information regarding the subfield characteristics and the different target processing conditions to relate the target conditions as a function of subfield characteristics. The method then detects non-uniformities in a micro-exposed subsequent substrate-processed under production-level processing conditions and exploits the correlation information to adjust the production-level conditions and achieve uniformity across the substrate.Type: GrantFiled: November 18, 2003Date of Patent: April 3, 2007Assignee: ASML Netherlands B.V.Inventors: Bernd Geh, Roger Henry Irwin, Eric Anthony Janda, David Merritt Phillips
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Publication number: 20070002300Abstract: A lithographic apparatus includes an illumination unit including a radiation source configured to generate a radiation bundle, an illumination optics with a numerical aperture NA0 and an aperture system; a projection lens having a first numerical aperture NAOB1; a support arranged between the illumination unit and the projection lens and configured to support a patterning device; a substrate support configured to support a substrate on which structures on the patterning device are imaged, wherein the first numerical aperture NAOB1 of the projection lens is smaller than the numerical aperture NA0 of the illumination unit.Type: ApplicationFiled: May 18, 2006Publication date: January 4, 2007Applicant: ASML Netherlands B.V.Inventors: Steven Hansen, Donis Flagello, Wolfgang Singer, Bernd Geh, Vladan Blahnik
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Publication number: 20060291031Abstract: An arrangement making use of two-dimensional arrays consisting of individually controllable elements, for forming aperture diaphragms in the beam paths of optical devices. In an arrangement of diaphragm apertures and/or filters, in which the form, position and/or optical characteristics can be changed, for use in optical devices, at least one two-dimensional array, consisting of individually controllable elements, is arranged for forming the diaphragm apertures and/or filters in the optical imaging and/or illumination beam paths and is connected with a control unit for controlling the individual elements In this way, the geometry, the optical characteristics and/or the position of the aperture diaphragms and/or the filters can be controlled very quickly. These changes can also be made “online” during the process of measurement or adjustment in the sense of optical fine tuning.Type: ApplicationFiled: May 8, 2006Publication date: December 28, 2006Inventors: Klaus Boehm, Peter Schaeffer, Wolfgang Harnisch, Thomas Engel, Axel Zibold, Bernd Geh
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Publication number: 20060256311Abstract: A method of transferring an image of a mask pattern onto a substrate with a lithographic apparatus is presented. The lithographic apparatus includes an illumination system configured to provide an illumination configuration and a projection system. In an embodiment of the invention, the method includes illuminating a mask pattern with an illumination configuration that includes a dark field component; and projecting an image of the illuminated pattern onto a photoresist layer coated on the substrate.Type: ApplicationFiled: May 16, 2005Publication date: November 16, 2006Applicant: ASML Netherlands B.V.Inventors: Steven Hansen, Bernd Geh, Donis Flagello
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Publication number: 20060164621Abstract: A lithographic apparatus includes a support structure configured to hold a patterning device, the patterning device configured to pattern a beam of radiation according to a desired pattern, a substrate table configured to hold a substrate and a projection system configured to project the beam as patterned onto a target portion of the substrate. The lithographic apparatus further includes a polarization modifier disposed in a path of the beam. The polarization modifier comprises a material having a radially varying birefringence.Type: ApplicationFiled: January 25, 2005Publication date: July 27, 2006Applicants: ASML NETHERLANDS B.V., CARL ZEISS SMT AGInventors: Michael Totzeck, Bernd Geh, Skip Miller
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Publication number: 20050254042Abstract: In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.Type: ApplicationFiled: July 22, 2005Publication date: November 17, 2005Inventors: Bernd Geh, Paul Graupner, Thomas Stammler, Dirk Stenkamp, Jochen Stuhler, Klaus Wurmbrand
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Publication number: 20050223539Abstract: A method of manufacturing an optical component comprising a substrate and a mounting frame with plural contact portions disposed at predetermined distances from each other is provided. The method comprises providing a measuring frame separate from the mounting frame for mounting the substrate, which measuring frame comprises a number of contact portions equal to a number of the contact portions of the mounting frame, wherein respective distances between the contact portions of the measuring frame are substantially equal to the corresponding distances between those of the mounting frame, measuring a shape of the optical surface of the substrate, while the substrate is mounted on the measuring frame, and mounting the substrate on the mounting frame such that the contact portions of the mounting frame are attached to the substrate at regions which are substantially the same as contact regions at which the substrate was attached to the measuring frame.Type: ApplicationFiled: April 12, 2004Publication date: October 13, 2005Applicant: Carl Zeiss SMT AGInventors: Bernhard Geuppert, Jens Kugler, Thomas Ittner, Bernd Geh, Rolf Freimann, Guenther Seitz, Bernhard Fellner, Bernd Doerband, Stefan Schulte
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Patent number: 6934011Abstract: In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.Type: GrantFiled: October 30, 2003Date of Patent: August 23, 2005Assignee: Carl Zeiss SMT AGInventors: Bernd Geh, Paul Gräupner, Thomas Stammler, Dirk Stenkamp, Jochen Stühler, Klaus Wurmbrand
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Publication number: 20050106479Abstract: A method of optimizing lithographic processing to achieve substrate uniformity, is presented herein. In one embodiment, The method includes deriving hyper-sampled correlation information indicative of photoresist behavior for a plurality of wafer substrates processed at pre-specified target processing conditions. The derivation includes micro-exposing subfields of the substrates with a pattern, processing the substrates at the various target conditions, determining photoresist-related characteristics of the subfields (e.g., Bossung curvatures), and extracting correlation information regarding the subfield characteristics and the different target processing conditions to relate the target conditions as a function of subfield characteristics. The method then detects non-uniformities in a micro-exposed subsequent substrate-processed under production-level processing conditions and exploits the correlation information to adjust the production-level conditions and achieve uniformity across the substrate.Type: ApplicationFiled: November 18, 2003Publication date: May 19, 2005Inventors: Bernd Geh, Roger Irwin, Eric Janda, David Phillips
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Publication number: 20040090617Abstract: In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.Type: ApplicationFiled: October 30, 2003Publication date: May 13, 2004Inventors: Bernd Geh, Paul Graupner, Thomas Stammler, Dirk Stenkamp, Jochen Stuhler, Klaus Wurmbrand
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Patent number: 6678240Abstract: In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.Type: GrantFiled: September 19, 2002Date of Patent: January 13, 2004Assignee: Carl Zeiss SMT AGInventors: Bernd Geh, Paul Gräupner, Klaus Wurmbrand, Thomas Stammler, Dirk Stenkamp, Jochen Stühler
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Publication number: 20030071986Abstract: In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.Type: ApplicationFiled: September 19, 2002Publication date: April 17, 2003Inventors: Bernd Geh, Paul Graupner, Klaus Wurmbrand, Thomas Stammler, Dirk Stenkamp, Jochen Stuhler
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Publication number: 20020085208Abstract: An interferometer system is disclosed. The system includes a radiation source for emitting radiation of a predetermined coherence length. The system also includes a device for splitting a beam emitted from the radiation source into a first partial beam and a second partial beam, and for subsequent superposition of the two partial beams, wherein optical path lengths of the two partial beams differ by a predetermined length difference (d1) between splitting and superposition, which length difference is greater than the coherence length. The system also includes a beam transmitting arrangement for directing the superimposed partial beams towards two optically effective, especially partially reflecting structures which are disposed at a distance (d2) from each other, wherein a first of the two structures is provided by the beam transmitting arrangement.Type: ApplicationFiled: August 21, 2001Publication date: July 4, 2002Inventors: Christoph Hauger, Werner Poltinger, Bernd Geh, Beate Moller