Abstract: An alignment method for a beam-directing unit of an interferometric measuring device for directing a laser beam of a laser beam source towards a plurality of measurement points of an object under measurement, wherein a three-dimensional model of a measurement surface of an object under measurement is created by a plurality of spatially resolved images. A measuring device for carrying out an interferometric measurement by laser radiation is also provided, having a controller which is designed to align a beam-directing unit of the measurement device.

Abstract: A method for determining the path of a measurement beam of an interferometric measuring device including the method steps: A. recording a plurality of spatially resolved images of the object under measurement; B. creating a three-dimensional model of the object under measurement; C. providing a measurement-head model; D. creating an association between coordinates in the three-dimensional model of the object under measurement and coordinates in the measurement-head model; E. determining the measurement beam path. A measuring device for interferometric measurement of an object under measurement is also provided.

Abstract: The invention relates to an alignment method for a beam-directing unit of an interferometric measuring device for directing a laser beam of a laser beam source towards a plurality of measurement points of an object under measurement, wherein a three-dimensional model of a measurement surface of an object under measurement is created by a plurality of spatially resolved images. The invention also relates to a measuring device for carrying out an interferometric measurement by laser radiation, having a controller which is designed to align a beam-directing unit of the measurement device.

Abstract: A method for determining the path of a measurement beam of an interferometric measuring device, includes A. recording a plurality of spatially resolved images of the object under measurement; B. creating a three-dimensional model of the object under measurement; C. providing a beam-position image-recording unit and recording at least one spatially resolved beam-position-determining image; D. determining the spatial position and orientation of the beam-position image-recording unit relative to the object under measurement; E. providing a spatial relation between the spatial path of the measurement beam of the interferometric measuring device and the position and orientation of the beam-position image-recording unit; F. determining the spatial path of the measurement beam of the interferometric measuring device relative to the object under measurement. A measuring device for interferometric measurement of an object under measurement is also provided.