Patents by Inventor Bernd Kallauch

Bernd Kallauch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High-pressure anneal
    Patent number: 9646850
    Abstract: A method of treating a semiconductor device is provided including the steps of loading the semiconductor device in a processing chamber, pressurizing the processing chamber by supplying a processing gas from a pressure chamber to the processing chamber, performing a thermal anneal of the semiconductor device in the processing chamber, and depressurizing the processing chamber by supplying the processing gas from the processing chamber to the pressure chamber.
    Type: Grant
    Filed: July 6, 2015
    Date of Patent: May 9, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Wieland Pethe, Dirk Noack, Bernd Kallauch
  • HIGH-PRESSURE ANNEAL
    Publication number: 20170011932
    Abstract: A method of treating a semiconductor device is provided including the steps of loading the semiconductor device in a processing chamber, pressurizing the processing chamber by supplying a processing gas from a pressure chamber to the processing chamber, performing a thermal anneal of the semiconductor device in the processing chamber, and depressurizing the processing chamber by supplying the processing gas from the processing chamber to the pressure chamber.
    Type: Application
    Filed: July 6, 2015
    Publication date: January 12, 2017
    Inventors: Wieland Pethe, Dirk Noack, Bernd Kallauch