Patents by Inventor Bernd Warm

Bernd Warm has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Illumination system for a wavelength of ? 193 nm, with sensors for determining an illumination
    Patent number: 7473907
    Abstract: There is provided an illumination system that includes (a) a light source that emits light having a wavelength ?193 nm, where the light provides a predetermined illumination in a plane distant from the light source and defines a used area in the plane, and (b) a sensor, situated in or near the plane, for detecting light outside the used area.
    Type: Grant
    Filed: March 28, 2005
    Date of Patent: January 6, 2009
    Assignees: Carl Zeiss SMT AG, ASML Netherlands
    Inventors: Wolfgang Singer, Martin Antoni, Johannes Wangler, Markus Weiss, Vadim Yevgenyevich Banine, Marcel Dierichs, Roel Moors, Karl Heinz Schuster, Axel Scholz, Philipp Bosselmann, Bernd Warm
  • Illumination system for a wavelength of less than or equal to 193 nm, with sensors for determining an illumination
    Publication number: 20050274897
    Abstract: There is provided an illumination system that includes (a) a light source that emits light having a wavelength ?193 nm, where the light provides a predetermined illumination in a plane distant from the light source and defines a used area in the plane, and (b) a sensor, situated in or near the plane, for detecting light outside the used area.
    Type: Application
    Filed: March 28, 2005
    Publication date: December 15, 2005
    Inventors: Wolfgang Singer, Martin Antoni, Johannes Wangler, Markus Weiss, Vadim Banine, Marcel Dierichs, Roel Moors, Karl Schuster, Axel Scholz, Philipp Bosselmann, Bernd Warm
  • Arrangement for the guidance of a beam during the treatment of a workpiece with a laser
    Patent number: 5101091
    Abstract: An arrangement for the guidance or conductance of a beam during the treatment of a workpiece with a laser, especially during a surface treatment by the laser beam, through the intermediary of mirrors which are interposed in the path of the beam intermediate a laser source and the workpiece. At least one deflecting mirror of the mirrors is equipped with adjusting elements for implementing a locally variable topography of its mirror surface, and is actuated from a control apparatus for effectuating a deformation or distortion of the cross-sectional geometry of the beam in conformance with the measure of a specified geometry of the beam focal point on the surface of the workpiece.
    Type: Grant
    Filed: April 12, 1990
    Date of Patent: March 31, 1992
    Assignee: Diehl GmbH & Co.
    Inventors: Robert Grub, Bernd Warm, Friedrich Lindner