Patents by Inventor Bernd Wuesthoff

Bernd Wuesthoff has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • OPTICAL ELEMENT MODULE
    Publication number: 20110063590
    Abstract: An optical element module comprising a plurality of module components is provided. The module components comprise an optical element, an optical element holder and a contact element. The optical element has a first coefficient of thermal expansion. The optical element holder holds the optical element via the first contact element and has a second coefficient of thermal expansion, the second coefficient of thermal expansion being different from the first coefficient of thermal expansion. At least one of the module components is adapted to provide at least a reduction of forces introduced into the optical element upon a thermally induced position change in the relative position between the optical element and the optical element holder, the position change resulting from a temperature situation variation in a temperature situation of the plurality of module components.
    Type: Application
    Filed: November 22, 2010
    Publication date: March 17, 2011
    Applicant: CARL ZEISS SMT AG
    Inventors: Thomas Bischoff, Hagen Federau, Willi Heintel, Bernd Wuesthoff, Jochen Wieland
  • Optical element module
    Patent number: 7859641
    Abstract: An optical element module comprising a plurality of module components is provided. The module components comprise an optical element, an optical element holder and a contact element. The optical element has a first coefficient of thermal expansion. The optical element holder holds the optical element via the first contact element and has a second coefficient of thermal expansion, the second coefficient of thermal expansion being different from the first coefficient of thermal expansion. At least one of the module components is adapted to provide at least a reduction of forces introduced into the optical element upon a thermally induced position change in the relative position between the optical element and the optical element holder, the position change resulting from a temperature situation variation in a temperature situation of the plurality of module components.
    Type: Grant
    Filed: January 17, 2008
    Date of Patent: December 28, 2010
    Assignee: Carl Zeiss SMT AG
    Inventors: Thomas Bischoff, Hagen Federau, Willi Heintel, Bernd Wuesthoff, Jochen Wieland
  • OPTICAL ELEMENT MODULE
    Publication number: 20080239270
    Abstract: An optical element module comprising a plurality of module components is provided. The module components comprise an optical element, an optical element holder and a contact element. The optical element has a first coefficient of thermal expansion. The optical element holder holds the optical element via the first contact element and has a second coefficient of thermal expansion, the second coefficient of thermal expansion being different from the first coefficient of thermal expansion. At least one of the module components is adapted to provide at least a reduction of forces introduced into the optical element upon a thermally induced position change in the relative position between the optical element and the optical element holder, the position change resulting from a temperature situation variation in a temperature situation of the plurality of module components.
    Type: Application
    Filed: January 17, 2008
    Publication date: October 2, 2008
    Applicant: CARL ZEISS SMT AG
    Inventors: Thomas Bischoff, Hagen Federau, Willi Heintel, Bernd Wuesthoff, Jochen Wieland