Patents by Inventor Bernhard D. Bernhard

Bernhard D. Bernhard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • COMPOSITION AND PROCESS FOR THE SELECTIVE REMOVE OF TiSiN
    Publication number: 20100065530
    Abstract: An aqueous removal composition and process for removing heater material, including TiSiN, from a microelectronic device having said material thereon. The aqueous removal composition includes at least one fluoride source, at least one passivating agent, and at least one oxidizing agent. The composition selectively removes TiSiN relative to oxides and nitrides that are adjacently present.
    Type: Application
    Filed: February 6, 2008
    Publication date: March 18, 2010
    Applicant: Advanced Technology Materials, Inc
    Inventors: Elizabeth Walker, Emanuel I. Cooper, Jun Liu, Bernhard D. Bernhard