Abstract: A closure device including a closure element for closing an opening surrounded by a valve seat of the closure device. The closure device has an open state, in which the closure element exposes the opening at least partly, for an object to be led through the opening, an intermediate state, in which the closure element is brought into alignment with the opening without contact with the valve seat, and a closed state, in which the closure element at least rests on the valve seat via a seal of the closure device. The seal has a hollow space, to which a pressure medium from a pressure source of the closure device can be applied, and the closure device has a suction apparatus for sucking the pressure medium out of the hollow space of the seal.

Abstract: A closure device (1) including a closure element (2) for closing an opening (5, 6) of the closure device (1) that is surrounded by a valve seat (3, 4) of the closure device (1), wherein the closure device (1) has an open state of the closure element (2), in which the closure element (2) exposes the opening (5, 6) at least partly, in particular completely, for an object to be led through the opening (5, 6), and an intermediate state of the closure element (2), in which the closure element (2) is brought into alignment with the opening (5, 6) without contact with the valve seat (3, 4), and a closed state of the closure element (2), in which the closure element (2) at least rests on the valve seat (3, 4) via a seal (7, 8) of the closure device (1), wherein the seal (7, 8) has a hollow space (9), to which a pressure medium from a pressure source (10) of the closure device (1) can be applied, wherein the closure device (1) has a suction apparatus (11) for sucking the pressure medium out of the hollow space (9) of

Abstract: A vacuum valve with a housing having a valve seat, a closure member which, in a closed position, is pressed against the valve seat, and a manual actuator, by which the closure member is displaceable in a linear manner and which includes a screw transmission, which is actuatable by a rotational element and has a first driving part connected to the rotational element and a second driving part connected to the closure member. The driving parts have mating external and internal threads. A closing spring acts between the valve housing and the closure member. The first driving part is displaceable relative to the valve housing parallel to the closing direction, and with the closure member in the open position, the closure member is held against displacement in the closing direction by a supporting stop against which a stop face of the rotational element or of the first driving part abuts.

Abstract: A vacuum valve including a closure element (3) and a valve housing (1) with a valve opening (4) and an interior (2) in which the closure element (3) is arranged, the closure element resting against a valve seat (6) surrounding the valve opening (4) in the closed state of the vacuum valve. The valve housing (1) has a housing wall (19) made of sheet metal, the housing wall delimiting the interior (2) and being provided with a window opening (20) in order to form the valve opening (4). The valve opening (4) is surrounded by a flange ring (21) that can be connected to a connection flange (28) of a vacuum unit (27) via screw connections, the vacuum unit having an interior and being attachable to the vacuum valve. The flange ring (21) has the valve seat (6) on which the closure element (3) is placed in the closed state of the vacuum valve.

Abstract: Device for closing an opening in a chamber wall of a low-pressure or vacuum chamber, having at least one movably mounted closure element, a main body with a through-opening and a seat, which surrounds the through-opening, the through-opening is congruent with the opening in the chamber wall, and the device has at least one open position of the closure element, in which the through-opening is exposed by the closure element, and at least one closed position, in which the through-opening is completely closed using the closure element. At least one elastic seal with an inflatable chamber is sealingly arranged in the closed position between the closure element and the seat and the elastic seal has in addition to the inflatable chamber a safety chamber for receiving fluid from the inflatable chamber in the event of a leak in the inflatable chamber.

Abstract: A vacuum valve including a closure element (3) and a valve housing (1) with a valve opening (4) and an interior (2) in which the closure element (3) is arranged, the closure element resting against a valve seat (6) surrounding the valve opening (4) in the closed state of the vacuum valve. The valve housing (1) has a housing wall (19) made of sheet metal, the housing wall delimiting the interior (2) and being provided with a window opening (20) in order to form the valve opening (4). The valve opening (4) is surrounded by a flange ring (21) that can be connected to a connection flange (28) of a vacuum unit (27) via screw connections, the vacuum unit having an interior and being attachable to the vacuum valve. The flange ring (21) has the valve seat (6) on which the closure element (3) is placed in the closed state of the vacuum valve.

Abstract: A vacuum valve with a housing having a valve seat, a closure member which, in a closed position, is pressed against the valve seat, and a manual actuator, by which the closure member is displaceable in a linear manner and which includes a screw transmission, which is actuatable by a rotational element and has a first driving part connected to the rotational element and a second driving part connected to the closure member. The driving parts have mating external and internal threads. A closing spring acts between the valve housing and the closure member. The first driving part is displaceable relative to the valve housing parallel to the closing direction, and with the closure member in the open position, the closure member is held against displacement in the closing direction by a supporting stop against which a stop face of the rotational element or of the first driving part abuts.

Abstract: A valve housing for a vacuum valve has opposed valve openings (8, 9), which have axes (10, 11) and are surrounded by flanges (6, 7) of the valve housing, these flanges being connected to housing parts (1, 2) of the valve housing. A respective flange (6, 7) has, or is formed on the whole by, a sheet metal part (12, 13) formed in a U-shaped manner, as viewed in a longitudinal center section through the flange (6, 7), parallel to the axis (10, 11) of the valve opening (8, 9), and directed via its open side toward the housing part (1, 2). The U-shaped sheet metal part (12, 13) includes inner and outer branches (14, 15) annularly surrounding the axis (10, 11) of the valve opening (8, 9) and a base crosspiece (16) connecting the inner and the outer branch (14, 15).

Abstract: A vacuum valve including a valve opening, a valve seat surrounding the valve opening, and a valve plate. During closing starting from the open position, the valve plate is moved over a main section of the closing path in a main closing direction parallel to the valve plate and the plane of the sealing surface, and then over a final section running at an angle to the sealing surface plane for guiding the valve plate onto the valve seat. A guide element on the wall that guides the valve plate over the end section of the closing path interacts with a guide element on the valve plate. The valve plate is guided over the final section of the closing path by guide surfaces that are angled relative to the sealing surface, and at least one guide surface is arranged on a guide element of the valve plate or the wall.

Abstract: Device for closing an opening in a chamber wall of a low-pressure chamber or vacuum chamber, which has at least one movably mounted closure element (1), at least one main body (2) with a through-opening (3) and at least one seat (4), which surrounds the through-opening (3), wherein the through-opening (3) can be made congruent or is congruent with the opening in the chamber wall, and wherein the device has at least one open position of the closure element (1), in which the through-opening (3) is exposed by the closure element (1), and at least one closed position of the closure element (1), in which the through-opening (3) is completely closed using the closure element (1), and has at least one elastic seal (5) with at least one inflatable chamber (6), wherein, in the closed position, the seal (5) is arranged between the closure element (1) and the seat (4) and the closure element (1) is sealed with respect to the seat (4) and wherein the elastic seal (5) has in addition to the inflatable chamber (6) at least

Abstract: A method for controlling or regulating a vacuum valve that includes: a valve body (1) with a valve opening (2); a closing member (3) that can be moved between an open position and a closed position over a closing path (s) for closing the vacuum valve and that closes the valve opening (2) in the closed position, in which at least one elastic seal (4) is pressed onto a seal face (35); an actuator (5) for moving the closing member (3); and a control device (9) by which the actuator (5) can be triggered; the point (p) of the closing path (s) at which the elastic seal (4) contacts the seal face (35) and/or a velocity (v) of the closing member (3) at that point is used as a controlling parameter for the control device (9).

Abstract: The invention relates to a vacuum valve for gas-tight sealing of a flow path, comprising at least one thrust rod, which has a cylindrical connecting section, and a closure plate which is removably mounted on the thrust rod and has at least one concave, semicircular first rod recess corresponding to the connecting section. A clamping piece, which has a concave, semicircular second rod recess corresponding to the connecting section, is adjustably mounted by means of a mechanical fixing element on the closure plate in such a way that the semicircular first rod recess and the opposite semicircular second rod recess define a cylindrical holding region which is adjustable in width and in which the cylindrical connecting section is detachably held.

Abstract: For a vacuum valve including a wall (1) with a valve opening (6) and a valve seat surrounding the valve opening (6) and a valve plate (7), during the closing of the vacuum valve starting from the open position of the valve plate (7), the valve plate (7) is moved over a main section of the closing path in a main closing direction (14) that is parallel to the valve plate (7) and parallel to the plane of the sealing surface (10) or the sealing ring of the valve seat, and is then moved, following the main section of the closing path, over a final section running at an angle to the valve plate (7) and at an angle to the plane of the sealing surface (10) or the sealing ring of the valve seat for guiding the valve plate (7) onto the valve seat.

Abstract: A vacuum valve including a valve housing two valve openings, a closure member having two closure plates, a transverse drive unit for adjusting the closure member between an open position and an intermediate position where the closure plates cover the valve openings, a first longitudinal drive unit for adjusting the closure member between the intermediate position and a first closed position, and a second longitudinal drive unit for adjusting the closure member between the intermediate position and a second closed. Each longitudinal drive unit includes a plurality of actuating elements which are guided into the vacuum area of the valve housing. These actuating elements are adjustable by driving elements between a retracted, passive position where their actuating ends are raised from the closure member and an advanced, active position where their actuating ends are pressed against the closure member and press the respective closure plate against the respective valve seat.

Abstract: A method for controlling or regulating a vacuum valve that includes: a valve body (1) with a valve opening (2); a closing member (3) that can be moved between an open position and a closed position over a closing path (s) for closing the vacuum valve and that closes the valve opening (2) in the closed position, in which at least one elastic seal (4) is pressed onto a seal face (35); an actuator (5) for moving the closing member (3); and a control device (9) by which the actuator (5) can be triggered; the point (p) of the closing path (s) at which the elastic seal (4) contacts the seal face (35) and/or a velocity (v) of the closing member (3) at that point is used as a controlling parameter for the control device (9).

Abstract: The invention relates to a vacuum valve for gas-tight sealing of a flow path, comprising at least one thrust rod, which has a cylindrical connecting section, and a closure plate which is removably mounted on the thrust rod and has at least one concave, semicircular first rod recess corresponding to the connecting section. A clamping piece, which has a concave, semicircular second rod recess corresponding to the connecting section, is adjustably mounted by means of a mechanical fixing element on the closure plate in such a way that the semicircular first rod recess and the opposite semicircular second rod recess define a cylindrical holding region which is adjustable in width and in which the cylindrical connecting section is detachably held.

Abstract: A vacuum valve comprises a conical sealing surface arranged at a valve body, a valve disk at which a conical sealing surface is arranged, and a sealing ring having a first sealing surface and a second sealing surface. The valve disk, the valve body and the sealing ring are made of metal at least in the areas of the sealing surfaces. The valve disk is constructed so as to be curved or angled considered in axial section through the center and encloses an angle of less than 90° with the closing direction in the unloaded state at least in a radial outer portion adjoining the sealing surface. The valve disk has an elasticity such that a displacement of the radial outer edge of the valve disk relative to a point in the center of the valve disk of at least 0.1% of the diameter of the valve disk in direction of the center axis of the valve disk is bought about in the closed position of the valve disk relative to the open position of the valve disk by an elastic deformation of the valve disk.

Abstract: A vacuum valve comprises a valve housing with a first valve opening and a second valve opening which are surrounded by a first valve seat and a second valve seat, a closure member comprising a first closure plate and a second closure plate, a transverse drive unit for adjusting the closure member in an actuation direction transverse to the longitudinal axes of the valve openings between an open position, in which the closure plates free the valve openings, and an intermediate position in which the closure plates cover the valve openings but are raised from the valve seats, a first longitudinal drive unit for adjusting the closure member between the intermediate position and a first closed position in which the first closure plate is pressed against the first valve seat, and a second longitudinal drive unit for adjusting the closure member between the intermediate position and a second closed position in which the second closure plate is pressed against the second valve seat.

Abstract: A vacuum valve comprises a conical sealing surface arranged at a valve body, a valve disk at which a conical sealing surface is arranged, and a sealing ring having a first sealing surface and a second sealing surface. The valve disk, the valve body and the sealing ring are made of metal at least in the areas of the sealing surfaces. The valve disk is constructed so as to be curved or angled considered in axial section through the center and encloses an angle of less than 90° with the closing direction in the unloaded state at least in a radial outer portion adjoining the sealing surface. The valve disk has an elasticity such that a displacement of the radial outer edge of the valve disk relative to a point in the center of the valve disk of at least 0.1% of the diameter of the valve disk in direction of the center axis of the valve disk is bought about in the closed position of the valve disk relative to the open position of the valve disk by an elastic deformation of the valve disk.

Abstract: A method for controlling a vacuum valve arranged between two vacuum chambers comprises a valve body with a valve opening, a closure member which closes the valve opening in a closed state of the vacuum valve and which releases the valve opening in an open state of the vacuum valve, wherein, for closing the valve opening by the closure member in the closed state of the vacuum valve, at least one flexible seal contacts a sealing surface of the vacuum valve, which sealing surface is acted upon by a pressing force in the closed state of the vacuum valve, an actuating device for opening and closing the vacuum valve with at least one actuator by which the seal is placed against the sealing surface for closing the vacuum valve, and with a control unit which controls this at least one actuator, pressure measurement values being supplied to this control unit as input signals from pressure sensors which detect the respective pressure in the two vacuum chambers, wherein a differential pressure between the two vacuum cha