Abstract: A treatment device and a method treat semiconductor objects with an aqueous treatment fluid. The treatment device has a treatment chamber and a supply device for supplying the treatment chamber with the aqueous treatment fluid. The supply device includes a chemical supply unit with at least two chemical containers and a water supply unit. At least one water line of the water supply unit and at least two chemical transport lines of the chemical supply unit are directly or indirectly connected with a single treatment fluid feed line. The single treatment fluid feed line is line-connected with the distribution device arranged in the treatment chamber.

Abstract: A treatment device and a method treat semiconductor objects with an aqueous treatment fluid. The treatment device has a treatment chamber and a supply device for supplying the treatment chamber with the aqueous treatment fluid. The supply device includes a chemical supply unit with at least two chemical containers and a water supply unit. At least one water line of the water supply unit and at least two chemical transport lines of the chemical supply unit are directly or indirectly connected with a single treatment fluid feed line. The single treatment fluid feed line is line-connected with the distribution device arranged in the treatment chamber.

Abstract: A shiftable device which acts as a brake or coupling, such as a frictional brake or a frictional clutch, includes a first component and a second component and a pressure ring arranged between the first and second components, wherein the pressure ring is connected non-rotatably or stationary to the first component, while being movable by an actuating and restoring device between two work positions which are axially offset relative to each other. At least one friction element which is compressed in an active position of the pressure ring is arranged between the pressure ring and the second component. A plurality of radially resilient tongues which each have a fixed tongue end are fastened without play in the area of the first component. A plurality of guide members supported on the pressure ring and connected to the other movable tongue ends serve to convert the axial movement of the pressure ring into a radial movement of the movable tongue ends.