Abstract: A valve plate has a plate portion with a front side elastomeric seal fitted thereon, and a connection apparatus arranged at the rear side for connecting the valve plate to a carrier apparatus of a vacuum valve. The connection apparatus includes first and second elongate connection portions, the first connection portion is located at one side and the second connection portion is located at the other side of the longitudinal center of the plate portion, with each being connected to the plate portion with the two spaced-apart ends thereof. The connection portions are spaced apart from the plate portion in the region between the two ends thereof, with a respective slot formed between the plate portion and the respective connection portion, and have in a central region of the longitudinal extent thereof a connection structure for connection to an end portion of a respective valve rod of the carrier apparatus.

Abstract: A valve plate has a plate portion with an elastomeric seal on a front face and an elongated connecting portion spaced apart from a rear face by a slot for fastening the valve plate to a valve rod. The extension of the connecting portion in the width direction is defined by opposing first and second side edges of the connecting portion when viewed in a plan view of the rear face of the plate portion. A connecting structure is configured in the connecting portion in a central region of the longitudinal extension of the first side edge of the connecting portion for connecting the connecting portion to an end portion of the valve rod. The connecting portion is reinforced in a region of its extension in the width direction adjoining the second side edge, relative to a region of its extension in the width direction adjoining the first side edge.

Abstract: A valve has a closure member for closing a valve orifice, particularly so as to be tight against gas, in a closed position of the closure member. The closure member can be moved in a closing process by at least one actuator starting from a first position of maximum opening at least along a first partial distance with a linear movement component in direction of its closed position, and the actuator carries out a closing stroke with a linear stroke direction for a movement of the closure member with this movement component. The actuator is so arranged in relation to the closure member that an angle diverging from 0° and 180° is provided between the linear movement component of the closure member along the first partial distance, proceeding from the first position of maximum opening, and the linear stroke direction of the actuator.

Abstract: A valve has a closure member for closing a valve orifice, particularly so as to be tight against gas, in a closed position of the closure member. The closure member can be moved in a closing process by at least one actuator starting from a first position of maximum opening at least along a first partial distance with a linear movement component in direction of its closed position, and the actuator carries out a closing stroke with a linear stroke direction for a movement of the closure member with this movement component. The actuator is so arranged in relation to the closure member that an angle diverging from 0° and 180° is provided between the linear movement component of the closure member along the first partial distance, proceeding from the first position of maximum opening, and the linear stroke direction of the actuator.

Abstract: A vacuum valve drive for linear displacement of a valve closure along an adjustment axis between an opened and closed position, and a vacuum valve comprising the vacuum valve drive, are provided. The vacuum valve drive comprises a drive housing containing a gas tight working space, a piston inside the working space, and at least one connecting rod which is led from the working space in a gas-tight manner to the valve closure. A static guide rod extends centrally and parallel to the adjustment axis inside the working space and is led through the piston. A precision linear bearing is between the piston and the guide rod. The piston is linearly guided by the guide rod with high precision and centered in the working space so that the valve closure is moved with high precision and pressed onto the valve seat.

Abstract: The invention relates to a vacuum valve (1) for the gas-tight closing of a flow path (F), comprising a closure disc (5) in which at least one rod recess (6) is formed, and at least one connecting rod (8). The closure disc (5) is removably mounted on the connecting rod (8) by positioning of the rod recess (6) on a connecting section (9) of the connecting rod (8) by means of a screw (16) which is led through a transverse bore (15) in the connecting section (9) and engages a threaded bore (14) in the rod recess (6). According to the invention, a projection (17) and a recess (18) are provided in the connecting region of the rod recess (6) and of the connecting section (9), the projection (17) and the recess (18) being formed in such a way that the projection (17) is gripped round by the recess (18) in a plane containing the connecting rod axis (19), and the closure disc (5) and the connecting rod (8) are fixed to one another in an interlocking manner in the directions of the displacement path (11).

Abstract: The invention relates to a vacuum valve drive (1) for linear displacement of a valve closure (2) along an adjustment axis (3) between an opened position (A) of the vacuum valve (4) and a position (B) in which it is closed gas-tight, and to a vacuum valve (4) comprising the vacuum valve drive (1). The vacuum valve drive (1) comprises a drive housing (5) which contains a gas-tight working space (6), a piston (7) inside the working space (6), which divides the working space (6) into a first and a second pressure space (6a, 6b), and at least one connecting rod (8; 9) which is led from the working space (6) in a gas-tight manner to the valve closure (2). According to the invention, a static guide rod (11) which extends centrally and parallel to the adjustment axis (3) inside the working space (6) and is led through the piston (7), and a precision linear bearing (12) between the piston (7) and the guide rod (11), are provided.