Abstract: A method of imaging a sample with a charged particle beam device, comprising: determining a first focusing strength of an objective lens of the charged particle beam device, the first focusing strength being adapted to focus a charged particle beam on a first surface region of the sample; determining a first focal subrange of a plurality of focal subranges such that the first focusing strength is within the first focal subrange, wherein the plurality of focal subranges is associated with a set of values of a calibration parameter; determining a first value of the calibration parameter, the first value being associated with the first focal subrange; and imaging the first surface region with the first value.

Abstract: According to an embodiment, a method for automated critical dimension measurement on a substrate for display manufacturing is provided. The method includes scanning a first field of view having a first size with a charged particle beam to obtain a first image having a first resolution of a first portion of the substrate for display manufacturing; determining a pattern within the first image, the pattern having a first position; scanning a second field of view with the charged particle beam to obtain a second image of a second portion of the substrate, the second field of view has a second size smaller than the first size and has a second position provided relative to the first position, the second image has a second resolution higher than the first resolution; and determining a critical dimension of a structure provided on the substrate from the second image.

Abstract: A method of automatically focusing a charged particle beam on a surface region of a sample is provided. The method includes acquiring a plurality of images for a corresponding plurality of focusing strength values; calculating a plurality of sharpness values based on the plurality of images, the plurality of sharpness values are calculated with a sharpness function provided as a sum in a frequency space based on the plurality of images; and determining subsequent focusing strength values of the plurality of focusing strength values with a golden ratio search algorithm based one the calculated sharpness values.

Abstract: A method of automatically focusing a charged particle beam on a surface region of a sample is provided. The method includes acquiring a plurality of images for a corresponding plurality of focusing strength values; calculating a plurality of sharpness values based on the plurality of images, the plurality of sharpness values are calculated with a sharpness function provided as a sum in a frequency space based on the plurality of images; and determining subsequent focusing strength values of the plurality of focusing strength values with a golden ratio search algorithm based one the calculated sharpness values.

Abstract: A method of automatically focusing a charted particle beam on a surface region of a sample is provided. The method includes acquiring a plurality of images for a corresponding plurality of focusing strength values; calculating a plurality of sharpness values based on the plurality of images, the plurality of sharpness values are calculated with a sharpness function provided as a sum in a frequency space based on the plurality of images; and determining subsequent focusing strength values of the plurality of focusing strength values with a golden ratio search algorithm based one the calculated sharpness values.

Abstract: According to an embodiment, a method for automated critical dimension measurement on a substrate for display manufacturing is provided. The method includes scanning a first field of view having a first size with a charged particle beam to obtain a first image having a first resolution of a first portion of the substrate for display manufacturing; determining a pattern within the first image, the pattern having a first position; scanning a second field of view with the charged particle beam to obtain a second image of a second portion of the substrate, the second field of view has a second size smaller than the first size and has a second position provided relative to the first position, the second image has a second resolution higher than the first resolution; and determining a critical dimension of a structure provided on the substrate from the second image.

Abstract: The present invention relates to a process for concentrating desired particles comprising a carrier-magnetic-separation comprising the following steps a) providing a feedstock which contains the desired particles and an undesired material; b) adding hydrophobic magnetic particles to the feedstock which results in a loaded feedstock containing agglomerates of the magnetic particles and the desired particles or of the magnetic particles and the undesired material; c) separating the agglomerates from the loaded feedstock by a separation method which results in isolated agglomerates, where the separation method is selected from sorting, electric separation, magnetic separation, screening, classification, gravity concentration, and flotation; d) breaking up the isolated agglomerates to obtain a suspension comprising the magnetic particles in desagglomerated form; and e) separating the magnetic particles from the suspension obtained in step d) by a separation method selected from sorting, electric separation, magne

Abstract: The present invention relates to a process for separating at least one first material from a mixture comprising this at least one first material, at least one second material and at least one third material, which comprises at least the following steps: (A) providing a mixture comprising at least one first material, at least one second material, at least one third material and at least one hydrocarbon in an amount of more than 0.

Abstract: A method of automatically focusing a charged particle beam on a surface region of a sample is provided. The method includes acquiring a plurality of images for a corresponding plurality of focusing strength values; calculating a plurality of sharpness values based on the plurality of images, the plurality of sharpness values are calculated with a sharpness function provided as a sum in a frequency space based on the plurality of images; and determining subsequent focusing strength values of the plurality of focusing strength values with a golden ratio search algorithm based one the calculated sharpness values.

Abstract: The present invention relates to a process for separating at least one first material from a mixture comprising this at least one first material, at least one second material and at least one third material, which comprises at least the following steps: (A) providing a mixture comprising at least one first material, at least one second material, at least one third material and at least one hydrocarbon in an amount of more than 0.

Abstract: A method of inspecting a sample with a charged particle beam device is described. The method comprises arranging the sample on a stage, determining a first focusing strength of an objective lens adapted to focus a charged particle beam on a first surface region of the sample that is arranged at a first distance from the objective lens in a direction of an optical axis, calculating a difference between the first distance and a predetermined working distance based on the determined first focusing strength, adjusting a distance between the first surface region and the objective lens by the calculated difference, and inspecting the first surface region. According to a further aspect, a charged particle beam device configured to be operated according to the above method is described.

Abstract: A method of inspecting a sample with a charged particle beam device is described. The method comprises arranging the sample on a stage, determining a first focusing strength of an objective lens adapted to focus a charged particle beam on a first surface region of the sample that is arranged at a first distance from the objective lens in a direction of an optical axis, calculating a difference between the first distance and a predetermined working distance based on the determined first focusing strength, adjusting a distance between the first surface region and the objective lens by the calculated difference, and inspecting the first surface region. According to a further aspect, a charged particle beam device configured to be operated according to the above method is described.

Abstract: The present invention provides aqueous emulsion polymers comprising (A) monomers A (B) at least one (meth)acrylate with olefinically unsaturated side groups (monomers B), and (C) at least one photoinitiator, and also the use thereof in coating materials, more particularly in exterior architectural paints.

Abstract: The invention also relates to a method to increase stain resistance and penetration resistance of aqueous coating compositions which method comprises providing a coating composition which contain at least one pigment, at least one film-forming polymer in the form of an aqueous polymer dispersion and at least one anionic surfactant, wherein the anionic surfactant comprises at least 85% by weight, preferably at least 90% by weight, more preferably at least 95% by weight, based on the total weight of anionic surfactant in the coating composition, of at least one anionic surfactant S, which is selected from semi-esters of sulfuric acid or phosphoric acid with an alcohol, which alcohol carries at least one alkyl radical having from 8 to 30 carbon atoms or an alkyl substituted phenyl radical wherein alkyl has from 4 to 30 carbon atoms and which alcohol may carry an oligo-C2-C3-alkylene-ether group provided that the number of repeating units in the oligo-C2-C3-alkylene-ether group is at most 15, or a salt thereof.

Abstract: The present invention provides aqueous emulsion polymers comprising (A) monomers A (B) at least one (meth)acrylate with olefinically unsaturated side groups (monomers B), and (C) at least one photoinitiator, and also the use thereof in coating materials, more particularly in exterior architectural paints.

Abstract: The present invention provides aqueous emulsion polymers comprising (A) monomers A (B) at least one (meth)acrylate with olefinically unsaturated side groups (monomers B), and (C) at least one photoinitiator, and also the use thereof in coating materials, more particularly in exterior architectural paints.

Abstract: The present invention relates to polymer dispersions which comprise highly branched polycarbonates, to a process for preparing them, and to their use.

Abstract: The present invention provides aqueous emulsion polymers comprising (A) monomers A (B) at least one (meth)acrylate with olefinically unsaturated side groups (monomers B), and (C) at least one photoinitiator, and also the use thereof in coating materials, more particularly in exterior architectural paints.

Abstract: The present invention provides a process for preparing emulsion polymer particles of a hollow core/shell structure in the presence of a monomer plasticizer having a ceiling temperature less than 181° C. wherein a polymerization inhibitor or reducing agent is not added to the aqueous emulsion of the core shell particles during the neutralization and swelling stage. The obtained core shell particles are useful in paints, paper coatings, foams, and cosmetics.

Abstract: The present invention relates to a process for preparing emulsion polymer particles having a core/shell structure and also to their use in paints, paper coatings, foams, and cosmetics.