Patents by Inventor Bernhard Wergl

Bernhard Wergl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6667839
    Abstract: A device is used to hold an optical element, in particular one made of a crystalline material, in particular of CaF2, while the optical element is being coated, in particular by the vapor-deposition of at least one functional layer in a vacuum coating plant. The latter has a device for mounting the optical element, it being possible for the optical element to be heated in the vacuum coating plant via suitable radiation, in particular infrared radiation. An intermediate element which has a lower thermal absorption than the device for mounting the optical element is arranged between the device for mounting the optical element and the optical element.
    Type: Grant
    Filed: December 27, 2001
    Date of Patent: December 23, 2003
    Assignee: Carl Zeiss SMT AG
    Inventors: Jürgen Hartmaier, Dietrich Klaassen, Thure Boehm, Bernhard Wergl, Michael Gerhard, Jens Spanuth, Ralf Kuschnereit, Peter Vogt, Harry Bauer