Abstract: An MMS has a first layer which has a first opening for letting pass a fluid. Additionally, a second layer which is arranged opposite the first layer is provided, and having a second layer for letting pass the fluid. Together with the first layer, it forms at least part of a layer stack with layers stacked in a stacking direction perpendicular to a substrate plane of the MEMS. A cavity arranged between the first layer and the second layer is arranged and has an element which is moveable along a direction in parallel to the substrate plane, which has at least a first and a second positioning, wherein, in the first positioning, flow-through of the fluid is inhibited and, in the second positioning, flow-through of the fluid through the cavity along the stacking direction is possible.

Abstract: An MEMS has a substrate and a cavity arranged in the substrate. A movable element is arranged in the cavity, configured to interact with a fluid arranged in the cavity, wherein a movement of the fluid and a movement of the movable element are causally related. A first opening which connects the cavity to an environment of the substrate causes a first phase offset of a first periodic oscillation which is causally related to the movement of the movable element when passing through the first opening. A second opening which connects the cavity to the environment of the substrate causes a second phase offset, different from the first phase offset, of a second periodic oscillation which is causally related to the movement of the movable element when passing through the second opening.

Abstract: A MEMS device includes a layer stack having a plurality of MEMS layers arranged along a layer stack direction. The MEMS device includes a movable element formed in a first MEMS layer and arranged between a second MEMS layer and a third MEMS layer of the layer stack. A driving unit is further provided, comprising a first drive structure mechanically firmly connected to the movable element and a second drive structure mechanically firmly connected to the second MEMS layer. The driving unit is configured to generate on the movable member a drive force perpendicular to the layer stack direction, and the drive force is configured to deflect the movable member.

Abstract: Proposed is a MEMS device comprising a layer stack having at least one second layer formed between a first layer and a third layer. A cavity is formed in the second layer. The MEMS device further comprises two laterally deflectable elements arranged laterally spaced apart in the cavity. Each of the two laterally deflectable elements comprises a respective end connected to a side wall of the cavity. Additionally, the MEMS device comprises a connecting element connected to the two laterally deflectable elements to couple the movement of the two laterally deflectable elements. A plurality of first fingers are arranged discretely spaced between the two laterally deflectable elements on the side wall of the cavity. Further, a plurality of second fingers are arranged discretely spaced between the two laterally deflectable elements on the connecting element. The plurality of second fingers interdigitate with the plurality of first fingers.

Abstract: Micromechanical sound transducer including a plurality of unilaterally suspended bending transducers. The plurality of bending transducers are configured for deflection within a plane of vibration and are arranged side by side within the plane of vibration along a first axis and are extending along a second axis which is transverse to the first axis. The bending transducers are alternately suspended on opposite sides and engage with one another. Each bending transducer includes a first electrode and a second electrode which are located opposite one another along the first axis to cause deflections of the respective bending transducer along the first axis upon application of voltage. Mutually facing electrodes of adjacent bending transducers are electrically connected to one another by a transverse connection crossing the plane of vibration transverse to the first axis.

Abstract: A platform includes first and second actuation layers. The first actuation layer includes first and second frames and a plurality of actuators connected between the first frame and the second frame, wherein the plurality of actuators are adapted to move the first and second frames with respect to each other in a first direction. The second actuation layer includes third and fourth frames and a plurality of actuators connected between the third frame and the fourth frame, wherein the plurality of actuators are adapted to move the third frame and the fourth frame with respect to each other in a second direction, different from the first direction. Thereby, the fourth frame of the second actuation layer and the second frame of the first actuation layer are mechanically connected to each other, such that the second actuation layer experiences the movement in the first direction induced by the first actuation layer.

Abstract: An MEMS having a layered structure includes a cavity disposed in the layered structure and fluidically coupled to an external environment of the layered structure through at least one opening in the layered structure. The MEMS includes an interaction structure movably disposed in a first MEMS plane and in the cavity along a plane direction and configured to interact with a fluid in the cavity, wherein movement of the interaction structure is causally related to movement of the fluid through the at least one opening. The MEMS further includes an active structure disposed in a second MEMS perpendicular to the plane direction, the active structure mechanically coupled to the insulation structure and configured such that an electrical signal at an electrical contact of the active structure is causally related to a deformation of the active structure, wherein the deformation of the active structure is causally related to movement of the fluid.

Abstract: Proposed is a MEMS device comprising a layer stack having at least one second layer formed between a first layer and a third layer. At least one first cavity is formed in the second layer. The MEMS device further comprises a laterally deflectable member having an end connected to a sidewall of the first cavity and a free end. Further, the MEMS device includes a passive element rigidly tethered to the free end of the laterally deflectable element to follow movement of the laterally deflectable element. The laterally deflectable element and the passive element divide the first cavity into a first sub-cavity and a second sub-cavity. The first sub-cavity is in contact with an ambient fluid of the MEMS device via at least a first opening. Further, the second subcavity is in contact with the ambient fluid of the MEMS device via at least a second opening. The at least one first opening is formed in a different layer of the first layer and the third layer than the at least one second opening.

Abstract: The invention relates to a microelectromechanical drive for moving an object, having electrostatic bending actuators, wherein each electrostatic bending actuator has a cantilever having at least one active element which has a layer stack forming at least one capacitor positioned offset to a center-of-gravity-plane of the cantilever which leads alongside a longitudinal axis of the cantilever from a supported end of the cantilever to a loose end, which is averted from the supported end of the cantilever and which has a contact area for engaging with the object. The microelectromechanical drive can be used to displace any target objects from nanoscopic to macroscopic sizes that are within the force-displacement configurations of the electrostatic bending actuators. The microelectromechanical drive is suited to act as an inchworm drive.

Abstract: Proposed is a MEMS device comprising a layer stack having at least one second layer formed between a first layer and a third layer. A cavity is formed in the second layer. The MEMS device further comprises two laterally deflectable elements arranged laterally spaced apart in the cavity. Each of the two laterally deflectable elements comprises a respective end connected to a side wall of the cavity. Additionally, the MEMS device comprises a connecting element connected to the two laterally deflectable elements to couple the movement of the two laterally deflectable elements. A plurality of first fingers are arranged discretely spaced between the two laterally deflectable elements on the side wall of the cavity. Further, a plurality of second fingers are arranged discretely spaced between the two laterally deflectable elements on the connecting element. The plurality of second fingers interdigitate with the plurality of first fingers.

Abstract: An acoustic bending converter system may have a plurality of bending converters configured such that deformable elements of the bending converters oscillate coplanarly in a common planar layer, wherein the bending converters include different resonance frequencies and different expansions of the deformable elements along a common longitudinal axis which is transversal to a direction of oscillation of the deformable elements. Further, an acoustic apparatus may have such an acoustic bending converter system.

Abstract: Micromechanical sound transducer including a plurality of unilaterally suspended bending transducers. The plurality of bending transducers are configured for deflection within a plane of vibration and are arranged side by side within the plane of vibration along a first axis and are extending along a second axis which is transverse to the first axis. The bending transducers are alternately suspended on opposite sides and engage with one another. Each bending transducer includes a first electrode and a second electrode which are located opposite one another along the first axis to cause deflections of the respective bending transducer along the first axis upon application of voltage. Mutually facing electrodes of adjacent bending transducers are electrically connected to one another by a transverse connection crossing the plane of vibration transverse to the first axis.

Abstract: An MEMS includes a substrate having a cavity. The MEMS includes a movable layer arrangement arranged in the cavity including a first beam, a second beam and a third beam that is arranged between the first beam and the second beam and that is fixed at discrete areas electrically insulated from the same. The movable layer arrangement is configured to perform a movement along a direction of movement in a substrate plane in response to an electrical potential between a first beam and a third beam or in response to an electrical potential between the second beam and the third beam. The first, second and third beams are part of a first layer of the movable layer arrangement. The movable layer arrangement includes a second layer arranged adjacent to the first layer along a direction perpendicular to the substrate plane. The second layer is arranged movably along the direction of movement.

Abstract: A micromechanical structure has a first micromechanical element, a second micromechanical element and a torsion spring arrangement having a first torsion spring element, having a first center line, mechanically connected to the first micromechanical element at a first contact region and to the second micromechanical element at a second contact region, and having a second torsion spring element, having a second center line, mechanically connected to the first micromechanical member at a third contact region and to the second micromechanical member at a fourth contact region in order to connect the first micromechanical member and the second micromechanical member to be movable relative to each other. A distance between the first and second center lines, starting from the first and third contact regions toward the second and fourth contact regions, decreases in a first portion and increases in a second portion.

Abstract: A bending transducer includes a deflectable element, a microelectromechanical transducer extending along a centroid fiber of the deflectable element deflecting the deflectable element in a first direction when a first electrical signal is applied, and a second microelectromechanical transducer extending along the centroid fiber deflecting the deflectable element in a second direction opposite to the first direction when a second electrical signal is applied, the centroid fiber being located between sides of the first and second microelectromechanical transducers facing away from each other, and an electrical control configured to vary the first and second electrical signals depending on an input signal such that a change of the first electrical signal and a change of the second electrical signal depends on the electrical input signal, and the phases of the first and second electrical signals are shifted relative to each other. A bending transducer operated as sensor is also presented.

Abstract: A platform includes first and second actuation layers. The first actuation layer includes first and second frames and a plurality of actuators connected between the first frame and the second frame, wherein the plurality of actuators are adapted to move the first and second frames with respect to each other in a first direction. The second actuation layer includes third and fourth frames and a plurality of actuators connected between the third frame and the fourth frame, wherein the plurality of actuators are adapted to move the third frame and the fourth frame with respect to each other in a second direction, different from the first direction. Thereby, the fourth frame of the second actuation layer and the second frame of the first actuation layer are mechanically connected to each other, such that the second actuation layer experiences the movement in the first direction induced by the first actuation layer.

Abstract: A MEMS transducer for interacting with a volume flow of a fluid includes a substrate including a cavity, and an electromechanical transducer connected to the substrate in the cavity and including an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.

Abstract: A MEMS transducer for interacting with a volume flow of a fluid includes a substrate including a cavity, and an electromechanical transducer connected to the substrate in the cavity and including an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.

Abstract: Micromechanical devices include actively deflectable elements. The activation is performed by a layer stack which causes the deflection responsive to attractive forces acting upon the layers of the layer stack.

Abstract: Micromechanical devices include actively deflectable elements. The activation is performed by a layer stack which causes the deflection responsive to attractive forces acting upon the layers of the layer stack.