Patents by Inventor Bert Kegel

Bert Kegel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Etching device
    Patent number: 4559099
    Abstract: An etching device is disclosed which comprises a high frequency generator and a reactor in close proximity to each other. The reactor has a plasma zone and a processing zone which open directly into each other. The device is advantageous for chemical dry etching in that a short distance between plasma zone and processing zone offers the benefit of small radical loss.
    Type: Grant
    Filed: August 24, 1984
    Date of Patent: December 17, 1985
    Assignee: Technics GmbH Europa
    Inventors: Gerhard Liebel, Bert Kegel