Abstract: A method is provided for electrically examining electronic components of an integrated circuit including a target region to be examined in which electronic components with contact points are located and further including a remaining, non-target region. The method includes performing an examination with a combined SEM/AFM nanoprobe. The examination includes imaging at least a portion of the non-target region with the scanning electron microscope part of the SEM/AFM nanoprobe in a first step, imaging at least a portion of the target region only with the atomic force microscope part of the SEM/AFM nanoprobe in a subsequent step, and recording, in a further subsequent step, current/voltage curves as characteristic electrical curves at the contact points with the nanoprobe, or performing a conductive AFM technique.

Abstract: The invention relates to a method for electrically examining electronic components of an integrated circuit. According to the invention, a method for electrically examining electronic components of an integrated circuit (1) is provided, comprising a target region (3) to be examined in which electronic components having contact points (5) are located, and a remaining region, referred to as non-target region (2), in which an examination is carried out using a combined SEM/AFM nanoprobe. In a first step, the non-target region (2) is at least partially imaged with the scanning electron microscope part of the SEM/AFM nanoprobe, and in a subsequent step the target region (3) is at least partially imaged with the atomic force microscope part of the SEM/AFM nanoprobe.

Abstract: Provided is a device comprising at least one tubular piezo element for the electro mechanical positioning of a slider within the piezo element. The device has least one elastic friction means for exerting a normal force on the slider, the friction means being connected to the piezo element. A method for controlling the device is also disclosed.

Abstract: Provided is a device comprising at least one tubular piezo element for the electro mechanical positioning of a slider within the piezo element. The device has least one elastic friction means for exerting a normal force on the slider, the friction means being connected to the piezo element. A method for controlling the device is also disclosed.

Abstract: The invention relates to a nanomanipulator that is used for analyzing or machining objects. Said nanomanipulator is equipped with several moving elements which can be adjusted to perform movements and support the object that is to be moved or an object holder in order to move at least one object relative to an analyzing position or machining position. Each of said moving elements is provided with one support area for the object that is to be moved or the object holder. The moving elements support at least one load-bearing plane in an axial direction of the nanomanipulator. The inventive nanomanipulator is characterized by moving elements comprising shearing piezo elements so as to move the load-bearing plane.

Abstract: A method for production of a bead single crystal includes heating at least one wire using electron beam heating to form the bead single crystal. The bead single crystal is advantageously produced by the electron beam heating of the at least one wire in vacuo. Bead single crystals comprising Ag, Al, Cr, Cu, Ir, Mo, Nb, Ni, Pd, Pt, Re, Rh, Ru, Ta, W or metal alloys, in particular, Ag/Au, Pt/Rh or Pt/Re alloys are advantageously produced by the method. The bead single crystals are preferably used in surface research, thin layer technology and electrochemistry.