Patents by Inventor Berta Dinu

Berta Dinu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method, system, and user interface for metrology target characterization
    Patent number: 10242290
    Abstract: Methods and systems are provided, which identify specified metrology target abnormalities using selected metrics and classify the identified target abnormalities geometrically to link them to corresponding sources of error. Identification may be carried out by deriving target signals such as kernels from specified regions of interest (ROIs) from corresponding targets on a wafer, calculating the metrics from the target signals using respective functions and analyzing the metrics to characterize the targets.
    Type: Grant
    Filed: January 10, 2014
    Date of Patent: March 26, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Inna Tarshish-Shapir, Yoel Feler, Anat Marchelli, Berta Dinu, Vladimir Levinski, Boris Efraty, Nuriel Amir, Mark Ghinovker, Amnon Manassen, Sigalit Robinzon
  • METROLOGY TARGET CHARACTERIZATION
    Publication number: 20140136137
    Abstract: Methods and systems are provided, which identify specified metrology target abnormalities using selected metrics and classify the identified target abnormalities geometrically to link them to corresponding sources of error. Identification may be carried out by deriving target signals such as kernels from specified regions of interest (ROIs) from corresponding targets on a wafer, calculating the metrics from the target signals using respective functions and analyzing the metrics to characterize the targets.
    Type: Application
    Filed: January 10, 2014
    Publication date: May 15, 2014
    Applicant: KLA-Tencor Corporation
    Inventors: Inna Tarshish-Shapir, Yoel Feler, Anat Marchelli, Berta Dinu, Vladimir Levinski, Boris Efraty, Nuriel Amir, Mark Ghinovker, Amnon Manassen, Sigalit Robinzon