Patents by Inventor Bertram F. Fowler, Jr.

Bertram F. Fowler, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer handling apparatus
    Patent number: 4952299
    Abstract: A device (24) for handling semiconduct wafers in a vacuum which includes a wafer-receiving arm (80) located in a vacuum chamber and an operating shaft (76) which extends from the vacuum chamber into an atmospheric chamber. The shaft is driven in an axial direction by means of a motor-driven ball screw drive system (74) and angularly by a rotary motor (106) coupled directly to the shaft. The shaft is sealed to maintain vacuum integrity within the vacuum chamber by means of a FERROFLUIDIC rotary seal (110) and by a static seal in the form of a bellows assembly (111) which moves axially with the shaft.
    Type: Grant
    Filed: October 31, 1988
    Date of Patent: August 28, 1990
    Assignee: Eaton Corporation
    Inventors: John M. Chrisos, Bertram F. Fowler, Jr., Richard S. Muka