Patents by Inventor Bertram Klein

Bertram Klein has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Microlithographic projection exposure apparatus
    Patent number: 10955754
    Abstract: A microlithographic projection exposure apparatus is configured to move a substrate stage in a scanning direction during the exposure process. The apparatus includes a projection lens for imaging mask structures onto a substrate during the exposure process with a manipulation device configured to change an imaging scale of the projection lens in at least two directions independently from one another. The apparatus also includes a control apparatus configured to perform different corrections of the imaging scale by way of suitable control of the manipulation device in the scanning direction and transversely to the scanning direction.
    Type: Grant
    Filed: January 23, 2020
    Date of Patent: March 23, 2021
    Assignee: Carl Zeiss SMT GmbH
    Inventor: Bertram Klein
  • MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
    Publication number: 20200241426
    Abstract: A microlithographic projection exposure apparatus is configured to move a substrate stage in a scanning direction during the exposure process. The apparatus includes a projection lens for imaging mask structures onto a substrate during the exposure process with a manipulation device configured to change an imaging scale of the projection lens in at least two directions independently from one another. The apparatus also includes a control apparatus configured to perform different corrections of the imaging scale by way of suitable control of the manipulation device in the scanning direction and transversely to the scanning direction.
    Type: Application
    Filed: January 23, 2020
    Publication date: July 30, 2020
    Inventor: Bertram Klein