Patents by Inventor Bertrand Flienter

Bertrand Flienter has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reduction of pad erosion
    Patent number: 5907771
    Abstract: Improved technique of forming trench capacitors without causing excessive erosion at the edges of the array region resulting from polishing. The erosion is reduced by providing a block mask to protect the array region while partially removing a portion of the hard mask used to etch the trenches in the field region. The partial etch equalizes the height of the hard mask in the array and field region after formation of the deep trenches by a reactive ion etch.
    Type: Grant
    Filed: September 30, 1997
    Date of Patent: May 25, 1999
    Assignee: Siemens Aktiengesellschaft
    Inventors: Robert Ploessl, Bertrand Flienter