Abstract: A pumping device intended to be connected to a process chamber (2) includes a dry primary vacuum pump, an auxiliary pump mounted so that the auxiliary pump bypasses a check valve on the vacuum pump, a first valve device connected to a purging device for purging the dry primary vacuum pump and intended to be connected to a gas supply, a second valve device mounted so that the second valve device bypasses a check valve upstream from the auxiliary pump, and a controller configured to control the first and second valve devices on the basis of an operating status of the process chamber in such a way that the first valve device is at least partially closed and the second valve device is open when the process chamber is operating at ultimate vacuum. Also a method for pumping of a process chamber by way of such a pumping device.

Abstract: The present invention relates to a pumping device intended to be connected to a process chamber (2) comprising a dry primary vacuum pump (3), an auxiliary pumping means (4) mounted so that said pumping means bypasses a check valve (13) on the vacuum pump (3), a first valve device (5) connected to a means for purging (11) the dry primary vacuum pump (3) and intended to be connected to a gas supply (14), a second valve device (6) mounted so that said second valve device bypasses a check valve (13) upstream from the auxiliary pumping means (4), and a control means configured to control the first and second valve devices (5, 6) on the basis of an operating status of the process chamber (2) in such a way that the first valve device (5) is at least partially closed and the second valve device (6) is open when the process chamber (2) is operating at ultimate vacuum. The present invention also relates to a method for pumping of a process chamber (2) by means of such a pumping device (1).

Abstract: In a system in accordance with the invention for detecting leaks, a mass spectrometer is connected to the aspiration side of a secondary pump whose discharge side is connected to the aspiration side of a primary pump driven by a rotational drive system adapted to vary the rotation speed of the primary pump between at least two different rotation speeds. An aspiration inlet is selectively connected by control valves either to the aspiration side of the primary pump or to the aspiration side or an intermediate area of the secondary pump. Variation of the rotation speed of the primary pump is used to perform faster pre-evacuation before the test, to detect grosser leaks, to compensate for a high level of outgassing or to adapt the sensitivity of the device, and equally to eliminate helium background noise from the primary pump.

Abstract: According to the invention, the presence of leaks is tested by placing the heat exchanger under test in a leakproof test chamber, by connecting the heat exchanger to a pressurization device that establishes an appropriate air pressure inside the internal cavity of the heat exchanger, by establishing a vacuum around the heat exchanger in the leakproof test chamber by means of a pump system, and by detecting the presence of helium around the heat exchanger in the leakproof test chamber by means of a helium leak detector. Testing is performed by using the helium which is naturally present in the air. This improves the availability of the machine and the reliability of the leak test, while also eliminating constraints and costs associated with using a tracer gas.

Abstract: A tracer gas leak detector includes a mass spectrometer delivering a signal q proportional to the partial pressure of the tracer gas in the spectrometer, wherein the detector further includes apparatus for obtaining from the signal q a signal ##EQU1## where A is an adjustable amplifier coefficient and dq/dt is the time derivative of the signal q, and apparatus for obtaining an output signal referred to as the processed signal of the form q.sub.t =q+q'.