Patents by Inventor Bertrant Bellet

Bertrant Bellet has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20120090382
    Abstract: The invention relates to a station for measuring gaseous pollution in a transport enclosure of semiconductor substrates comprising a gas analysis device for determining the concentration of the gas to be analysed, said analysis device including: a diluting unit (3) configured to dilute a flow of gas to be analysed (Q) according to a dilution coefficient (D), and an analysis unit (5) communicating with the diluting unit (3) via a sampling pipe (7) in order to sample a flow of diluted gas (Qa) by pumping, and comprising at least one processing means for: analysing the sampled flow of diluted gas (Qa), and determining the concentration (C) of the gas flow to be analysed (Q) according to said analysed flow of diluted gas (Qa) and the dilution coefficient (D). The invention further relates to an associated gas analysis method.
    Type: Application
    Filed: June 11, 2010
    Publication date: April 19, 2012
    Applicant: ADIXEN VACUUM PRODUCTS
    Inventors: Arnaud Favre, Erwan Godot, Bertrant Bellet