Patents by Inventor Beth Pruitt

Beth Pruitt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of epitaxially growing piezoresistors
    Patent number: 8187903
    Abstract: A method of forming a device with a piezoresistor is disclosed herein. In one embodiment, the method includes providing a substrate, etching a trench in the substrate to form a vertical wall, growing a piezoresistor layer epitaxially on the vertical wall, and separating the vertical wall from an underlying layer of the substrate that extends along a horizontal plane such that the piezoresistor layer is movable with respect to the underlying layer within the horizontal plane.
    Type: Grant
    Filed: January 13, 2009
    Date of Patent: May 29, 2012
    Assignee: Robert Bosch GmbH
    Inventors: Gary Yama, Beth Pruitt, Arnoldus Alvin Barlian
  • METHOD OF EPITAXIALLY GROWING PIEZORESISTORS
    Publication number: 20100176465
    Abstract: A method of forming a device with a piezoresistor is disclosed herein. In one embodiment, the method includes providing a substrate, etching a trench in the substrate to form a vertical wall, growing a piezoresistor layer epitaxially on the vertical wall, and separating the vertical wall from an underlying layer of the substrate that extends along a horizontal plane such that the piezoresistor layer is movable with respect to the underlying layer within the horizontal plane.
    Type: Application
    Filed: January 13, 2009
    Publication date: July 15, 2010
    Applicants: Stanford University, Robert Bosch GmbH
    Inventors: Gary Yama, Beth Pruitt, Arnoldus Alvin Barlian