Patents by Inventor Betsy Marsh

Betsy Marsh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for vibration control
    Patent number: 6959484
    Abstract: A vibration control system comprising an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The actuator may comprise one or more plates or elements of electro-active material bonded to an electroded sheet.
    Type: Grant
    Filed: January 27, 2000
    Date of Patent: November 1, 2005
    Assignee: Cymer, Inc.
    Inventors: Ronald Spangler, Emanuele Bianchini, Baruch Pletner, Betsy Marsh, Robert Jacques
  • Method and device for vibration control
    Publication number: 20050200243
    Abstract: A vibration control system comprising an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The actuator may comprise one or more plates or elements of electro-active material bonded to an electroded sheet.
    Type: Application
    Filed: January 4, 2005
    Publication date: September 15, 2005
    Inventors: Ronald Spangler, Emanuele Bianchini, Baruch Pletner, Betsy Marsh, Robert Jacques