Patents by Inventor Bhanwar Sinjh

Bhanwar Sinjh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Local interconnect etch characterization using AFM
    Patent number: 6207575
    Abstract: In one embodiment, the present invention relates to a method of processing a wafer including characterizing a local interconnect etch, involving the steps of etching a portion a wafer comprising at least one device thereon to form a local interconnect etched portion on the wafer, scanning the local interconnect etched portion of the wafer with an atomic force microscope having a flared probing tip, generating surface profile data of the local interconnect etched portion from the atomic force microscope, and characterizing the surface profile data.
    Type: Grant
    Filed: February 20, 1998
    Date of Patent: March 27, 2001
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Wenge Yang, Bhanwar Sinjh