Abstract: A tuning fork gyroscope that is insensitive to magnetic field gradients is provided. The tuning fork gyroscope includes a first electrically conducting proof mass and a second electrically conducting proof mass connected through electrically conducting suspensions to anchors attached to one or more insulating substrates, and an electrical-resistance mid-point electrically connected to opposing ends of the first electrically conducting proof mass and to opposing ends of the second electrically conducting proof mass. The tuning fork gyroscope provides an input to a sense charge amplifier. The sense charge amplifier generates an output signal indicative of a rotation of the tuning fork gyroscope. The output signal is independent of a magnetic field gradient.

Abstract: Systems and methods for three-axis sensor chip packages are provided. In one embodiment, a directional sensor package comprises: a base; a first sensor die mounted to the base, the first sensor die having a first active sensor circuit and a first plurality of metal pads electrically coupled to the first active sensor circuit; a second sensor die mounted to the base, the second sensor die having a second active sensor circuit located on a first surface, and a second plurality of metal pads electrically coupled to the second active sensor circuit located on a second surface. The second sensor die is positioned such that the second active sensor circuit is oriented orthogonally with respect to the first active sensor circuit region and is perpendicular to the base. The second surface is adjacent to the first surface and angled with respect to a plane of the first surface.

Abstract: A method of fabricating a multi-axis sensor is provided. The method includes forming patterns of sacrificial material overlaying a substrate and overlaying a flexible material on the sacrificial material and an anchor-surface of the substrate. The flexible material includes sensor-regions, an anchor-region, and at least one hinge-region. The method further includes forming sensor elements from orientable sensor material overlaying respective sensor-regions of the flexible material; forming at least one respective anchor-hinge in the flexible material along the boundary between the anchor-region and an adjacent sensor region; forming the sensor-regions, the anchor-region, and the at least one hinge-region in the flexible material; training the sensor elements to form respective oriented-sensor elements that are oriented in the same direction; etching the sacrificial material; and etching the substrate at an angle from the anchor-surface.

Abstract: A tuning fork gyroscope that is insensitive to magnetic field gradients is provided. The tuning fork gyroscope includes a first electrically conducting proof mass and a second electrically conducting proof mass connected through electrically conducting suspensions to anchors attached to one or more insulating substrates, and an electrical-resistance mid-point electrically connected to opposing ends of the first electrically conducting proof mass and to opposing ends of the second electrically conducting proof mass. The tuning fork gyroscope provides an input to a sense charge amplifier. The sense charge amplifier generates an output signal indicative of a rotation of the tuning fork gyroscope. The output signal is independent of a magnetic field gradient.