Abstract: Embodiments of the disclosure are in the field of integrated circuit structure fabrication. In an example, an integrated circuit structure includes a first conductive interconnect line in a first inter-layer dielectric (ILD) layer above a substrate, a second conductive interconnect line in a second ILD layer above the first ILD layer, and a conductive via coupling the first conductive interconnect line and the second conductive interconnect line, the conductive via having a single, nitrogen-free tantalum (Ta) barrier layer. In another example, a method of fabricating an integrated circuit structure includes forming a partial trench in an inter-layer dielectric (ILD layer, the ILD layer on an etch stop layer, etching a hanging via that lands on the etch stop layer, and performing a breakthrough etch through the etch stop layer to form a trench and via opening in the ILD layer and the etch stop layer.

Abstract: A diffraction grating with independently controlled diffraction angles for optical beams at different wavelengths may be used to redirect and couple light to a waveguide in an efficient, space-saving manner. The diffraction grating can include a layer with optical permittivity and associated index contrast of the grating grooves at different grating periods dependent on wavelength.

Abstract: A diffraction grating with independently controlled diffraction angles for optical beams at different wavelengths may be used to redirect and couple light to a waveguide in an efficient, space-saving manner. The diffraction grating can include a layer with optical permittivity and associated index contrast of the grating grooves at different grating periods dependent on wavelength.

Abstract: A diffraction grating with independently controlled diffraction angles for optical beams at different wavelengths may be used to redirect and couple light to a waveguide in an efficient, space-saving manner. The diffraction grating can include a layer with optical permittivity and associated index contrast of the grating grooves at different grating periods dependent on wavelength.

Abstract: Disclosed herein are methods comprising: illuminating a first location of an optothermal substrate with electromagnetic radiation; wherein the optothermal substrate converts at least a portion of the electromagnetic radiation into thermal energy; and wherein the optothermal substrate is in thermal contact with a liquid sample comprising a plurality of thermally reducible metal ions; thereby: generating a confinement region at a location in the liquid sample proximate to the first location of the optothermal substrate; trapping at least a portion of the plurality of thermally reducible metal ions within the confinement region; and thermally reducing the trapped portion of the plurality of thermally reducible metal ions; thereby: depositing a metal particle on the optothermal substrate at the first location. Also disclosed herein are systems for performing the methods described herein. Also disclosed herein are patterned substrates made by the methods described herein, and methods of use thereof.

Abstract: A diffraction grating with independently controlled diffraction angles for optical beams at different wavelengths may be used to redirect and couple light to a waveguide in an efficient, space-saving manner. The diffraction grating can include a layer with optical permittivity and associated index contrast of the grating grooves at different grating periods dependent on wavelength.

Abstract: A diffraction grating with independently controlled diffraction angles for optical beams at different wavelengths may be used to redirect and couple light to a waveguide in an efficient, space-saving manner. The diffraction grating can include a layer with optical permittivity and associated index contrast of the grating grooves at different grating periods dependent on wavelength.

Abstract: A diffraction grating with independently controlled diffraction angles for optical beams at different wavelengths may be used to redirect and couple light to a waveguide in an efficient, space-saving manner. The diffraction grating can include a layer with optical permittivity and associated index contrast of the grating grooves at different grating periods dependent on wavelength.

Abstract: Disclosed herein are methods comprising: illuminating a first location of an optothermal substrate with electromagnetic radiation; wherein the optothermal substrate converts at least a portion of the electromagnetic radiation into thermal energy; and wherein the optothermal substrate is in thermal contact with a liquid sample comprising a plurality of thermally reducible metal ions; thereby: generating a confinement region at a location in the liquid sample proximate to the first location of the optothermal substrate; trapping at least a portion of the plurality of thermally reducible metal ions within the confinement region; and thermally reducing the trapped portion of the plurality of thermally reducible metal ions; thereby: depositing a metal particle on the optothermal substrate at the first location. Also disclosed herein are systems for performing the methods described herein. Also disclosed herein are patterned substrates made by the methods described herein, and methods of use thereof.