Patents by Inventor Bharath Kumar Hanchanoor Rathnakara Gowda

Bharath Kumar Hanchanoor Rathnakara Gowda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • INTERLOCK SYSTEM FOR PROCESSING CHAMBER EXHAUST ASSEMBLY
    Publication number: 20240043994
    Abstract: Exemplary semiconductor processing systems may include a gas source coupled with a number of processing chambers. The gas source may include a controller. Each chamber may include an exhaust assembly having a foreline and a pump. The systems may include at least one abatement system coupled with each pump. The systems may include a plurality of exhaust lines that extend between each pump and the abatement system. The systems may include a dilution gas source coupled with each exhaust line. The systems may include a mass flow controller coupled between the dilution gas source and each exhaust line. The systems may include a temperature sensor coupled with each exhaust line between the pump and the abatement system. The temperature sensor may be communicatively coupled with the controller of the gas source, which may control flow of a gas to a chamber based on a measurement from the temperature sensor.
    Type: Application
    Filed: August 8, 2022
    Publication date: February 8, 2024
    Applicant: Applied Materials, Inc.
    Inventors: Daemian Raj Benjamin Raj, Liliya I. Krivulina, Bharath Kumar Hanchanoor Rathnakara Gowda, Collen Leng, Syed A. Alam, Uwe P. Haller, Robert Casanova, Ryan Thomas Downey, Peter Standish