Patents by Inventor Bhaswan Manjunath

Bhaswan Manjunath has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Compact device for enhancing the mixing of gaseous species
    Patent number: 9327252
    Abstract: Apparatus and system for mixing gas comprising a first valve coupled to a first conduit controlling flow of a first gas, a second valve coupled to a second conduit controlling flow of a second gas, a controller controlling the valves, a base block with a first gas input coupled to the first conduit, a second gas input coupled to the second conduit and an output opening, a mixing chamber formed within the base block, wherein the mixing chamber is coupled to the first gas input and the second gas input to receive input gases, an inner block disposed within the mixing chamber, the inner block including a body with an inner volume and one or more perimeter holes formed through the body coupling the mixing chamber to the inner volume of the inner block; and a gas outlet configured to flow gas through the output opening of the base block.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: May 3, 2016
    Assignee: APPLIED MATERIALS, INC.
    Inventors: John W. Lane, Berrin Daran, Ramachandra Murthy Gunturi, Mariusch Gregor, Bhaswan Manjunath, Prashanth Vasudeva
  • COMPACT DEVICE FOR ENHANCING THE MIXING OF GASEOUS SPECIES
    Publication number: 20140269156
    Abstract: Apparatus and system for mixing gas comprising a first valve coupled to a first conduit controlling flow of a first gas, a second valve coupled to a second conduit controlling flow of a second gas, a controller controlling the valves, a base block with a first gas input coupled to the first conduit, a second gas input coupled to the second conduit and an output opening, a mixing chamber formed within the base block, wherein the mixing chamber is coupled to the first gas input and the second gas input to receive input gases, an inner block disposed within the mixing chamber, the inner block including a body with an inner volume and one or more perimeter holes formed through the body coupling the mixing chamber to the inner volume of the inner block; and a gas outlet configured to flow gas through the output opening of the base block.
    Type: Application
    Filed: March 15, 2013
    Publication date: September 18, 2014
    Inventors: JOHN W. LANE, BERRIN DARAN, RAMACHANDRA MURTHY GUNTURI, MARIUSCH GREGOR, BHASWAN MANJUNATH, PRASHANTH VASUDEVA
  • Method of diffusion bonding a fluid flow apparatus
    Patent number: 7798388
    Abstract: The present invention relates to a method of diffusion bonding of steel and steel alloys, to fabricate a fluid delivery system of the kind which would be useful in semiconductor processing and in other applications which require high purity fluid handling.
    Type: Grant
    Filed: May 31, 2007
    Date of Patent: September 21, 2010
    Assignee: Applied Materials, Inc.
    Inventors: Mark Crockett, John W. Lane, Vincent Kirchhoff, Marcel E. Josephson, Hong P. Gao, Bhaswan Manjunath
  • Method of preventing bonding between a load distribution block and a plate set of stacked sheets during diffusion bonding of a fluid flow structure
    Publication number: 20090072009
    Abstract: The present invention relates to diffusion bonding of patterned sheets to form a fluid flow handling structure, and to a method of preventing bonding between a load distribution block and a plate set of stacked sheets during the diffusion bonding process.
    Type: Application
    Filed: October 21, 2008
    Publication date: March 19, 2009
    Inventors: Mark Crockett, John W. Lane, Vincent Kirchhoff, Marcel E. Josephson, Hong P. Gao, Bhaswan Manjunath
  • Method of improving surface roughness of fluid flow conduits within a diffusion bonded fluid flow structure
    Publication number: 20090057375
    Abstract: The present invention relates to a method of diffusion bonding sheets of patterned material to fabricate a fluid delivery system; and particularly relates to a method of improving the interior surface roughness of fluid flow conduits formed within the diffusion bonded fluid delivery system structure.
    Type: Application
    Filed: October 21, 2008
    Publication date: March 5, 2009
    Inventors: Mark Crockett, John W. Lane, Vincent Kirchhoff, Marcel E. Josephson, Hong P. Gao, Bhaswan Manjunath
  • STAINLESS STEEL OR STAINLESS STEEL ALLOY FOR DIFFUSION BONDING
    Publication number: 20080296354
    Abstract: The present invention relates to stainless steel sheets which would be useful in semiconductor processing and in other applications which require high purity fluid handling. The invention also relates to a method of selecting and processing such sheets.
    Type: Application
    Filed: May 31, 2007
    Publication date: December 4, 2008
    Inventors: MARK CROCKETT, John W. Lane, Vincent Kirchhoff, Marcel E. Josephson, Hong P. Gao, Bhaswan Manjunath
  • DIFFUSION BONDED FLUID FLOW APPARATUS USEFUL IN SEMICONDUCTOR MANUFACTURING
    Publication number: 20080296351
    Abstract: The present invention relates to a method of diffusion bonding of steel and steel alloys, to fabricate a fluid delivery system of the kind which would be useful in semiconductor processing and in other applications which require high purity fluid handling.
    Type: Application
    Filed: May 31, 2007
    Publication date: December 4, 2008
    Inventors: Mark Crockett, John W. Lane, Vincent Kirchhoff, Marcel E. Josephson, Hong P. Gao, Bhaswan Manjunath