Abstract: A swapper assembly of a cluster tool includes a housing, at least two swappers, and a motor assembly. The at least two swappers are at least partially disposed within and rotatable relative to the housing. Each swapper includes a body, a first arm, and a second arm. The first arm and second arm are rotatable relative to the body. The motor assembly includes at least one motor, and the motor assembly is configured to operate the at least two swappers simultaneously to change the position of the first arm and second arm.

Abstract: Exemplary semiconductor processing systems may include a chamber having a body having a sidewall and a base. The chamber may include a pumping liner atop the body and a faceplate atop the pumping liner. The chamber may include a substrate support. The substrate support may include a plate and a shaft. The chamber may include a seal plate coupled with the shaft below the plate. The seal plate may have a greater diameter than the plate. The seal plate may include an RF gasket outward of the plate. The substrate support and the seal plate may be translatable between a transfer position in which the RF gasket is vertically spaced apart from the pumping liner and a process position in which the RF gasket is in contact with the pumping liner. A processing region may be isolated from an environment below the sealing plate when in the process position.

Abstract: Methods, systems, and apparatus, including computer programs encoded on a computer storage medium, for generating and distributing interactive documents. An interactive document generation platform receives information that defines a series of interactive pages of an interactive document to be provided for facilitating performance of a procedure, receives multimedia content to be presented with interactive pages of the interactive document, and generates a data package that includes metadata, structural data, and multimedia content for the interactive document. The data package is provided to an interactive document distribution platform configured for adapting the interactive document for presentation by a plurality of different types of computing devices, receiving a request for the interactive document for a computing device of a particular type, and providing to the computing device a version of the interactive document that is adapted for presentation by the particular type of the computing device.

Abstract: Methods, systems, and apparatus, including computer programs encoded on a computer storage medium, for generating and distributing interactive documents. An interactive document generation platform receives information that defines a series of interactive pages of an interactive document to be provided for facilitating performance of a procedure, receives multimedia content to be presented with interactive pages of the interactive document, and generates a data package that includes metadata, structural data, and multimedia content for the interactive document. The data package is provided to an interactive document distribution platform configured for adapting the interactive document for presentation by a plurality of different types of computing devices, receiving a request for the interactive document for a computing device of a particular type, and providing to the computing device a version of the interactive document that is adapted for presentation by the particular type of the computing device.