Abstract: The present disclosure relates to cassette structures and related methods for batch processing in epitaxial deposition operations. In one implementation, a cassette configured for disposition in a substrate processing chamber includes a first wall, a second wall spaced from the first wall, and one or more sidewalls extending between and coupled to the first wall and the second wall. The cassette includes one or more inlet openings formed in the one or more sidewalls, and one or more outlet openings formed in the one or more sidewalls opposite the one or more inlet openings. The cassette includes a plurality of levels that include a plurality of substrate supports mounted to the one or more sidewalls and spaced from each other along the one or more sidewalls.

Abstract: Examples of rivet-type fastener are described. The rivet-type fastener may further include a fastener pin. The fastener pin includes a planar head portion and a shaft longitudinally extending from the head portion. The fastener pin may further include a cantilevered snap element at a distal end of the shaft. A portion of the cantilevered snap element is flexibly moveable with respect to the axis of shaft. The rivet-type fastener comprises a fastener body which in turn comprises a collared portion with a central opening. A plurality of elongated portions extend orthogonally from the collared portion, wherein the elongated portions are radially positioned about the central axis and about the edges of the central opening.

Abstract: Examples of rivet-type fastener are described. The rivet-type fastener may further include a fastener pin. The fastener pin includes a planar head portion and a shaft longitudinally extending from the head portion. The fastener pin may further include a cantilevered snap element at a distal end of the shaft. A portion of the cantilevered snap element is flexibly moveable with respect to the axis of shaft. The rivet-type fastener comprises a fastener body which in turn comprises a collared portion with a central opening. A plurality of elongated portions extend orthogonally from the collared portion, wherein the elongated portions are radially positioned about the central axis and about the edges of the central opening.