Abstract: A method for characterizing the performance of an electrostatic chuck prior to installing the chuck in the vacuum chamber of a semiconductor processing system in a production line. One or more characteristics of the electrostatic chuck are measured and compared with the known characteristics of a reference chuck. The comparison indicates the performance of the chuck and projects the performance of the chuck in an actual operating environment. The characteristics that are measured include the chuck impedance, the current-voltage characteristic of the chuck, the local plasma density proximate the support surface of the chuck, and the cooling or heating rate of the chuck.

Abstract: A method for characterizing the performance of an electrostatic chuck prior to installing the chuck in the vacuum chamber of a semiconductor processing system in a production line. One or more characteristics of the electrostatic chuck are measured and compared with the known characteristics of a reference chuck. The comparison indicates the performance of the chuck and projects the performance of the chuck in an actual operating environment. The characteristics that are measured include the chuck impedance, the current-voltage characteristic of the chuck, the local plasma density proximate the support surface of the chuck, and the cooling or heating rate of the chuck.

Abstract: A grid for producing a pattern on a surface. The grid includes elongated members connected together at intersections and extending about a plurality of open areas to form a mesh-like structure. Connecting members are connected to the elongated members at the intersections. The connecting members extend outwardly from at least one said elongated member. The connecting members have a thickness less than the thickness of the elongated members. The bottoms of the connecting members and bottoms of the elongated members are flush. The grid is placed on a surface and a liquid coating is spread over the surface in the open areas between the elongated members. The liquid coating is allowed to set. Preferably there is a removable coating on the grid which is removed after the liquid coating is set.

Abstract: A system for monitoring events which is capable of automatically configuring itself responsive to changes in system hardware comprising: a plurality of input circuits for detecting events and a plurality of output circuits for indicating the presence of the events; a computer means, including a microcontroller connected to the input circuits for two-way communication with the input circuits and further connected to the output circuits; a front panel and means at the front panel for further indicating the events; and means within the computer means for automatically configuring the system responsive to changes in system hardware.

Abstract: A communication system in which a controller is coupled over a communication path with two or more transponders, at least two of which transponders have different addresses, which controller and transponders communicate by periodically transmitting a broadcast message simultaneously to all transponders, transmitting an acknowledge message indicative of a new input received by at least one of the transponders, and individually polling all of the transponders using a polling technique which incorporates time periods to allow communication between the controller and a selected transponder, wherein the polling is only activated subsequent to the transmission of the acknowledge message. Periodic polls of all transponders in sequence provide supervision of the integrity of the system.