Patents by Inventor Billy Suber

Billy Suber has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SINGLE WAFER BACKSIDE WET CLEAN
    Publication number: 20070181149
    Abstract: A method and apparatus for cleaning a backside of a substrate is disclosed. The method includes placing the substrate parallel to a platter, wherein the backside of the substrate is facing a top side of the platter in a spaced apart relation, thus defining a gap therebetween. Subsequently, a liquid is flowed through the platter and into continuous contact with the entire backside of the substrate and the top side of the platter.
    Type: Application
    Filed: March 21, 2007
    Publication date: August 9, 2007
    Inventors: Alexander Ko, Glen Egami, Billy Suber, Konstantin Smekalin