Abstract: Techniques are provided for rule-based flight management system logging. In one aspect, the techniques involve receiving a rule set, wherein the rule set represents an indicator of a flight management system bug, error, or flight safety concern, writing log data to a first memory, wherein the log data is generated by the flight management system, and upon determining that an error indicator associated with the log data violates a rule of the rule set, writing the log data of the first memory to a second memory.

Abstract: A wafer support device is provided. The wafer support device includes a susceptor having a surface configured to support a bottom surface of a wafer. The susceptor has a plurality of guiding recesses. The wafer support device also includes a pin lift that has a plurality of pins extending therefrom. The plurality of pins is configured to be passed via the plurality of guiding recesses of the susceptor to engage the bottom surface of the wafer. The susceptor is configured to be moved relative to the plurality of pins in a direction substantially orthogonal to the surface of the susceptor.

Abstract: An apparatus comprising a semiconductor processing chamber, a plasma generator, and a pipe connecting a semiconductor processing chamber and the plasma generator. The plasma generator includes a generation chamber, a radio frequency generator which generates an ion plasma within the generation chamber, and a magnetic device which confines the plasma primarily within a center region of the generation chamber.