Patents by Inventor Binh Quoc Nguyen

Binh Quoc Nguyen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for handling wafers in microelectronic manufacturing
    Patent number: 6533531
    Abstract: A wafer handling device includes a platform having a plurality of movable grippers. A driver is mounted on the platform and selectively couples to at least one of the plurality of grippers to selectively move at least one of the plurality of grippers with regard to the platform. The driver may be magnetically coupled to at least one gripper to move it between a first proximal position and a first distal position. The driver may be mounted on the platform with a track assembly that effectuates a linear magnetic propulsion field to move the driver between the first axial position and the second axial position.
    Type: Grant
    Filed: December 29, 1998
    Date of Patent: March 18, 2003
    Assignee: ASML US, Inc.
    Inventors: Binh Quoc Nguyen, Alton Phillips