Patents by Inventor Binni VARGHESE

Binni VARGHESE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210230739
    Abstract: A physical vapor deposition chamber a first target comprising a bottom surface, a top surface, a cross-sectional thickness defining a first target cross-sectional thickness between the top surface and the bottom surface, a first end and a second end opposite the first end, the cross-sectional thickness at the first end being less than the cross-sectional thickness at the second end. Methods of processing a substrate are also provided.
    Type: Application
    Filed: January 19, 2021
    Publication date: July 29, 2021
    Applicant: Applied Materials, Inc.
    Inventors: Binni Varghese, Ribhu Gautam
  • Publication number: 20210124252
    Abstract: Methods for the manufacture of extreme ultraviolet (EUV) mask blanks and production systems therefor are disclosed. A method for forming an EUV mask blank comprises forming a bilayer on a portion of a multi-cathode PVD chamber interior and then forming a multilayer stack of Si/Mo on a substrate in the multi-cathode PVD chamber.
    Type: Application
    Filed: October 22, 2020
    Publication date: April 29, 2021
    Applicant: Applied Materials, Inc.
    Inventors: Wen Xiao, Sanjay Bhat, Shiyu Liu, Binni Varghese, Vibhu Jindal, Azeddine Zerrade
  • Publication number: 20200026178
    Abstract: Extreme ultraviolet (EUV) mask blanks, methods for their manufacture and production systems therefor are disclosed. The EUV mask blanks comprise a substrate; a multilayer stack of reflective layers on the substrate; a capping layer on the multilayer stack of reflecting layers; and an absorber layer on the capping layer, the absorber layer made from an alloy of tantalum and nickel.
    Type: Application
    Filed: July 16, 2019
    Publication date: January 23, 2020
    Inventors: Vibhu Jindal, Hui Ni Grace Fong, Binni Varghese, Shuwei Liu, Abbas Rastegar
  • Patent number: 10255939
    Abstract: Various aspects of this disclosure provide a recording medium for heat-assisted-magnetic-recording (HAMR). The recording medium may include a substrate. The recording medium may further include a recording layer. The recording medium may also include a thermal control layer between the recording layer and the substrate. The thermal control layer may have a thermal conductivity that increases with increasing temperature.
    Type: Grant
    Filed: June 2, 2016
    Date of Patent: April 9, 2019
    Assignee: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH
    Inventors: Jiang Feng Hu, Wen Huei Tsai, Kiat Min Cher, Binni Varghese, Chee Beng Lim, Jian Zhong Shi
  • Publication number: 20170018286
    Abstract: Various aspects of this disclosure provide a recording medium for heat-assisted-magnetic-recording (HAMR). The recording medium may include a substrate. The recording medium may further include a recording layer. The recording medium may also include a thermal control layer between the recording layer and the substrate. The thermal control layer may have a thermal conductivity that increases with increasing temperature.
    Type: Application
    Filed: June 2, 2016
    Publication date: January 19, 2017
    Inventors: Jiang Feng HU, Wen Huei TSAI, Kiat Min CHER, Binni VARGHESE, Chee Beng LIM, Jian Zhong SHI