Patents by Inventor Biswajit PATHAK

Biswajit PATHAK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200024727
    Abstract: A system and method for real-time monitoring of surface profile and thickness measurement of thin film using a grating array based wavefront sensor is disclosed. A laser beam is incident on a substrate on which deposition is to be performed and then a reflected beam from the substrate falls directly or after transmission falls on an array of gratings. The direction of a diffracted beam of a particular diffraction order is a function of the orientation and periodicity of the corresponding grating. The diffracted beam is made to pass through a combination of lenses to generate an array of focal spots. The surface profile of the incident laser beam is estimated from the displacements of these focal spots corresponding to the elements in the grating array. The grating array pattern can be altered to avail certain benefits such as simultaneous thickness and surface profiling, higher frame rate, flexible dynamic range and so on.
    Type: Application
    Filed: July 18, 2016
    Publication date: January 23, 2020
    Inventors: Bosanta Ranjan BORUAH, Alika KHARE, Biswajit PATHAK, Rahul KESARWANI