Patents by Inventor Björn Hubertus Maria BUKKEMS

Björn Hubertus Maria BUKKEMS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus having an active base frame support
    Patent number: 10578983
    Abstract: A lithographic apparatus comprises a base frame constructed to form a supporting structure of the lithographic apparatus, an active base frame support arranged between the base frame and a ground floor. The active base frame support is configured to support the base frame on the ground floor. The active base frame support comprises an actuator configured to exert a force in a horizontal direction between the base frame and the ground plane. The lithographic apparatus further comprises a control device configured to drive the actuator, a signal representative of a disturbance force on the base frame being provided to the control device, the control device being configured to drive the actuator using the force sensor signal.
    Type: Grant
    Filed: November 17, 2016
    Date of Patent: March 3, 2020
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Hans Butler, Björn Hubertus Maria Bukkems, Cornelius Adrianus Lambertus De Hoon, Maurice Willem Jozef Etiënne Wijckmans
  • LITHOGRAPHIC APPARATUS HAVING AN ACTIVE BASE FRAME SUPPORT
    Publication number: 20180373156
    Abstract: A lithographic apparatus comprises a base frame constructed to form a supporting structure of the lithographic apparatus, an active base frame support arranged between the base frame and a ground floor. The active base frame support is configured to support the base frame on the ground floor. The active base frame support comprises an actuator configured to exert a force in a horizontal direction between the base frame and the ground plane. The lithographic apparatus further comprises a control device configured to drive the actuator, a signal representative of a disturbance force on the base frame being provided to the control device, the control device being configured to drive the actuator using the force sensor signal.
    Type: Application
    Filed: November 17, 2016
    Publication date: December 27, 2018
    Inventors: Hans BUTLER, Björn Hubertus Maria BUKKEMS, Cornelius Adrianus Lambertus DE HOON, Maurice Willem Jozef Etiënne WIJCKMANS