Patents by Inventor Bjoern Butscher

Bjoern Butscher has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Control apparatus and method for controlling a manipulator in respect of a microlithographic projection exposure apparatus
    Patent number: 10852642
    Abstract: A control apparatus controls at least one manipulator for modifying a parameter of a microlithographic projection exposure apparatus by generating a target for a travel variable, which defines a modification of the parameter to be undertaken via the manipulator. The control apparatus is configured to generate the target from a state characterization of the projection exposure apparatus by optimizing a merit function. A merit function includes at least one penalty term for taking account of a limit for a property of the projection exposure apparatus as an implicit constraint and the penalty term is formulated in such a way that the function value thereof tends to “infinity” as the property approaches the limit.
    Type: Grant
    Filed: January 3, 2020
    Date of Patent: December 1, 2020
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Bjoern Butscher, Christian Wald
  • CONTROL APPARATUS AND METHOD FOR CONTROLLING A MANIPULATOR IN RESPECT OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
    Publication number: 20200225587
    Abstract: A control apparatus controls at least one manipulator for modifying a parameter of a microlithographic projection exposure apparatus by generating a target for a travel variable, which defines a modification of the parameter to be undertaken via the manipulator. The control apparatus is configured to generate the target from a state characterization of the projection exposure apparatus by optimizing a merit function. A merit function includes at least one penalty term for taking account of a limit for a property of the projection exposure apparatus as an implicit constraint and the penalty term is formulated in such a way that the function value thereof tends to “infinity” as the property approaches the limit.
    Type: Application
    Filed: January 3, 2020
    Publication date: July 16, 2020
    Inventors: Bjoern Butscher, Christian Wald