Patents by Inventor Bjorn Skyberg

Bjorn Skyberg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for substrate orientation
    Patent number: 7077973
    Abstract: Method and apparatus for etching a metal layer disposed on a substrate, such as a photolithographic reticle, are provided. In one aspect, a method is provided for processing a photolithographic reticle including positioning the reticle in a first orientation on a reticle support in a processing chamber, wherein the reticle comprises a metal photomask layer formed on an optically transparent substrate, and a patterned resist material deposited on the metal photomask layer, etching the metal photomask layer in the first orientation, positioning the reticle in at least a second orientation, and etching the metal photomask layer in the at least second orientation.
    Type: Grant
    Filed: April 18, 2003
    Date of Patent: July 18, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Alex Buxbaum, Bjorn Skyberg
  • Methods for substrate orientation
    Publication number: 20040209477
    Abstract: Method and apparatus for etching a metal layer disposed on a substrate, such as a photolithographic reticle, are provided. In one aspect, a method is provided for processing a photolithographic reticle including positioning the reticle in a first orientation on a reticle support in a processing chamber, wherein the reticle comprises a metal photomask layer formed on an optically transparent substrate, and a patterned resist material deposited on the metal photomask layer, etching the metal photomask layer in the first orientation, positioning the reticle in at least a second orientation, and etching the metal photomask layer in the at least second orientation.
    Type: Application
    Filed: April 18, 2003
    Publication date: October 21, 2004
    Applicant: Applied Materials, Inc.
    Inventors: Alex Buxbaum, Bjorn Skyberg