Patents by Inventor Bjorn Zetterlund

Bjorn Zetterlund has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6060387
    Abstract: A new process for creating a transistor in an integrated circuit provides for two suicide formations, each independent of the other, from two metal depositions and formations steps. The process produces a sufficiently low resistance silicide layer over the source/drain region surfaces of the transistor while also creating a lower resistance silicide over the gate interconnects. In an example embodiment of the invention a near-planar isolation process is used applied such that the gate interconnect surfaces are co-planar. A first silicide layer is formed over the source/drain regions. A dielectric gap-fill material is applied. A planarization method such as chemical mechanical polishing is used to remove the gap fill material down to the top surface of the gate interconnect. A relatively thick suicide is then formed over the top surface of the gate interconnect.
    Type: Grant
    Filed: November 20, 1995
    Date of Patent: May 9, 2000
    Assignee: Compaq Computer Corporation
    Inventors: Adam Shepela, Gregory J. Grula, Bjorn Zetterlund